Device quality hydrogenated amorphous silicon films deposited at high growth rates
1997 ◽
Vol 211
(3)
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pp. 229-236
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Keyword(s):
1995 ◽
Vol 36
(1)
◽
pp. 65-80
◽
Keyword(s):
Keyword(s):
Keyword(s):
2016 ◽
Vol 55
(4S)
◽
pp. 04ES05
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Keyword(s):
1999 ◽
Vol 17
(6)
◽
pp. 3240-3245
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2000 ◽
Vol 266-269
◽
pp. 304-308
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