CW laser annealing of boron and arsenic-implanted silicon; electrical properties, crystalline structure and limitations

1981 ◽  
Vol 12 (3) ◽  
pp. 44
Keyword(s):  
Electrical Properties ◽  
Crystalline Structure ◽  
Laser Annealing ◽  
Cw Laser

Optical, Structural and Electrical Characteristics of Explosively Crystallized Si Thin Films on Glass Substrates

1981 ◽  
Vol 4 ◽  
Author(s):  
G. Auvert ◽  
D. Bensahel ◽  
A. Perio ◽  
F. Morin ◽  
G.A. Rozgonyi ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Laser Annealing ◽  
The State ◽  
Electrical Characteristics ◽  
Glass Substrates ◽  
Explosive Crystallization ◽  
Cw Laser ◽  
Structural And Electrical Properties ◽  
Si Films

ABSTRACTExplosive Crystallization occurs in cw laser annealing on a-Si films deposited on glass substrates at laser scan speeds higher than 30 cm/sec. Optical, structural and electrical properties of the crystallized films at various laser scan speeds confirm the existence of two kinds of explosive growth depending on the state of crystallinity of the starting material.

cw laser anneal of polycrystalline silicon: Crystalline structure, electrical properties

1978 ◽  
Vol 33 (8) ◽  
pp. 775-778 ◽  
Author(s):  
A. Gat ◽  
L. Gerzberg ◽  
J. F. Gibbons ◽  
T. J. Magee ◽  
J. Peng ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Crystalline Structure ◽  
Polycrystalline Silicon ◽  
Cw Laser ◽  
Laser Anneal

scholarly journals A comparison between furnace and cw laser annealing of a-Si : evidence of different crystallization states

1982 ◽  
Vol 17 (12) ◽  
pp. 783-786 ◽  
Author(s):  
D. Bensahel ◽  
G. Auvert ◽  
Y. Pauleau ◽  
J.C. Pfister
Keyword(s):  
Laser Annealing ◽  
Cw Laser

Crystalline Structure and Electrical Properties of Solid Solutions YCoxMn1-xO3

2001 ◽  
Vol 206-213 ◽  
pp. 1393-1396
Author(s):  
D. Gutierrez ◽  
Octavio Peña ◽  
J.F. Fernandez ◽  
C. Moure
Keyword(s):  
Electrical Properties ◽  
Crystalline Structure ◽  
Solid Solutions

CW laser annealing of boron implanted polycrystalline silicon

1985 ◽  
Vol 28 (4) ◽  
pp. 339-344 ◽  
Author(s):  
S. Peterström ◽  
G. Holmén ◽  
G. Alestig
Keyword(s):  
Polycrystalline Silicon ◽  
Laser Annealing ◽  
Cw Laser

Influence of the crystalline structure on the electrical properties of CVD diamond films

1996 ◽  
Vol 5 (6-8) ◽  
pp. 741-746 ◽  
Author(s):  
C. Jany ◽  
F. Foulon ◽  
P. Bergonzo ◽  
A. Brambilla ◽  
F. Silva ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Crystalline Structure ◽  
Diamond Films ◽  
Cvd Diamond

scholarly journals Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC

2019 ◽  
Vol 97 ◽  
pp. 62-66 ◽  
Author(s):  
S. Rascunà ◽  
P. Badalà ◽  
C. Tringali ◽  
C. Bongiorno ◽  
E. Smecca ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Ohmic Contacts ◽  
Laser Annealing ◽  
Annealing Process

Electrical properties for poly-Ge films fabricated by pulsed laser annealing

2006 ◽  
Vol 508 (1-2) ◽  
pp. 315-317 ◽  
Author(s):  
Hajime Watakabe ◽  
Toshiyuki Sameshima ◽  
Hiroshi Kanno ◽  
Masanobu Miyao
Keyword(s):  
Electrical Properties ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Pulsed Laser Annealing
Sign in / Sign up

Export Citation Format

Share Document