Conductance transient, capacitance–voltage and deep-level transient spectroscopy characterization of atomic layer deposited hafnium and zirconium oxide thin films

2003 ◽  
Vol 47 (10) ◽  
pp. 1623-1629 ◽  
Author(s):  
S. Dueñas ◽  
H. Castán ◽  
J. Barbolla ◽  
K. Kukli ◽  
M. Ritala ◽  
...  
Keyword(s):  
Thin Films ◽  
Zirconium Oxide ◽  
Deep Level Transient Spectroscopy ◽  
Deep Level ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Capacitance Voltage ◽  
Transient Capacitance ◽  
Transient Spectroscopy

Capacitance-voltage and deep-level-transient spectroscopy characterization of defects near SiO2/SiC interfaces

2011 ◽  
Vol 109 (6) ◽  
pp. 064514 ◽  
Author(s):  
A. F. Basile ◽  
J. Rozen ◽  
J. R. Williams ◽  
L. C. Feldman ◽  
P. M. Mooney
Keyword(s):  
Deep Level Transient Spectroscopy ◽  
Deep Level ◽  
Capacitance Voltage ◽  
Transient Spectroscopy

Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxide Thin Films

2010 ◽  
Vol 157 (10) ◽  
pp. G193 ◽  
Author(s):  
Aile Tamm ◽  
Marianna Kemell ◽  
Jekaterina Kozlova ◽  
Timo Sajavaara ◽  
Massimo Tallarida ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

Characterization of point defects in ZnO thin films by optical deep level transient spectroscopy

2010 ◽  
Vol 248 (4) ◽  
pp. 941-949 ◽  
Author(s):  
Martin Ellguth ◽  
Matthias Schmidt ◽  
Rainer Pickenhain ◽  
Holger V. Wenckstern ◽  
Marius Grundmann
Keyword(s):  
Thin Films ◽  
Point Defects ◽  
Deep Level Transient Spectroscopy ◽  
Deep Level ◽  
Zno Thin Films ◽  
Transient Spectroscopy

Atomic Layer Deposition and Characterization of Dysprosium-Doped Zirconium Oxide Thin Films

2015 ◽  
Vol 21 (7-8-9) ◽  
pp. 181-187 ◽  
Author(s):  
Aile Tamm ◽  
Jekaterina Kozlova ◽  
Tõnis Arroval ◽  
Lauri Aarik ◽  
Peeter Ritslaid ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Deep level transient spectroscopy characterization of InAs self-assembled quantum dots

2001 ◽  
Vol 89 (2) ◽  
pp. 1172-1174 ◽  
Author(s):  
V. V. Ilchenko ◽  
S. D. Lin ◽  
C. P. Lee ◽  
O. V. Tretyak
Keyword(s):  
Quantum Dots ◽  
Deep Level Transient Spectroscopy ◽  
Deep Level ◽  
Self Assembled ◽  
Transient Spectroscopy

Effects of oxygen sources on properties of atomic-layer-deposited ferroelectric hafnium zirconium oxide thin films

2021 ◽  
Author(s):  
Ah-Jin Cho ◽  
Jihoon Jeon ◽  
Hong Keun Chung ◽  
In-Hwan Baek ◽  
Kun Yang ◽  
...  
Keyword(s):  
Thin Films ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films
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