scholarly journals Characterization of TiN film grown by low-pressure-chemical-vapor-deposition

1997 ◽  
Vol 308-309 ◽  
pp. 594-598 ◽  
Author(s):  
Y.J Mei ◽  
T.C Chang ◽  
J.C Hu ◽  
L.J Chen ◽  
Y.L Yang ◽  
...  
2013 ◽  
Vol 539 ◽  
pp. 1-11 ◽  
Author(s):  
C. Aguilera ◽  
J.C. González ◽  
A. Borrás ◽  
D. Margineda ◽  
J.M. González ◽  
...  

2018 ◽  
Vol 219 ◽  
pp. 189-195 ◽  
Author(s):  
André do Nascimento Barbosa ◽  
N.J.S. Figueroa ◽  
C.D. Mendoza ◽  
A.L. Pinto ◽  
F.L. Freire

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