Investigation of borophosphosilicate glass roughness and planarization with the atomic force microscope technique
Keyword(s):
2005 ◽
Vol 59
(1-6)
◽
pp. 1-152
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2000 ◽
Keyword(s):
2007 ◽
Vol 56
(10)
◽
pp. 896-899
2004 ◽
Vol 19
(1)
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pp. 387-395
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Keyword(s):
2006 ◽
Vol 47
(1)
◽
pp. 85-89
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1999 ◽
Vol 140
(3-4)
◽
pp. 265-270
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2009 ◽
Vol 614
◽
pp. 3-9
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2002 ◽
Vol 245
(3-4)
◽
pp. 212-218
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Keyword(s):
1992 ◽
Vol 50
(2)
◽
pp. 1146-1147