Noble gas influence on reactive radio frequency magnetron sputter deposition of TiN films

Vacuum ◽

10.1016/s0042-207x(98)00264-4 ◽

1998 ◽

Vol 51 (4) ◽

pp. 635-640 ◽

Author(s):

C.P Lungu ◽

M Futsuhara ◽

O Takai ◽

M Braic ◽

G Musa

Keyword(s):

Radio Frequency ◽

Noble Gas ◽

Sputter Deposition ◽

Radio Frequency Magnetron ◽

Tin Films ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Radio Frequency Magnetron Sputter Deposition as a Tool for Surface Modification of Medical Implants

Modern Technologies for Creating the Thin-film Systems and Coatings ◽

10.5772/66396 ◽

2017 ◽

Author(s):

Roman Surmenev ◽

Alina Vladescu ◽

Maria Surmeneva ◽

Anna Ivanova ◽

Mariana Braic ◽

...

Keyword(s):

Surface Modification ◽

Radio Frequency ◽

Sputter Deposition ◽

Radio Frequency Magnetron ◽

Medical Implants ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Investigations on the growth and optical properties of one dimensional ZnO nanostructures grown by radio frequency magnetron sputter deposition

Materials Research Bulletin ◽

10.1016/j.materresbull.2013.05.089 ◽

2013 ◽

Vol 48 (10) ◽

pp. 3811-3816 ◽

Author(s):

P. Sundara Venkatesh ◽

V. Ramakrishnan ◽

K. Jeganathan

Keyword(s):

Optical Properties ◽

Radio Frequency ◽

Sputter Deposition ◽

Radio Frequency Magnetron ◽

Zno Nanostructures ◽

One Dimensional ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Characterization and Performance of LiFePO[sub 4] Thin-Film Cathodes Prepared with Radio-Frequency Magnetron-Sputter Deposition

Journal of The Electrochemical Society ◽

10.1149/1.2746804 ◽

2007 ◽

Vol 154 (8) ◽

pp. A805 ◽

Author(s):

Jian Hong ◽

Chunsheng Wang ◽

Nancy J. Dudney ◽

Michael J. Lance

Keyword(s):

Thin Film ◽

Radio Frequency ◽

Sputter Deposition ◽

Radio Frequency Magnetron ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter ◽

And Performance

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Physical principles of radio-frequency magnetron sputter deposition of calcium-phosphate-based coating with tailored properties

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2021.127098 ◽

2021 ◽

Vol 413 ◽

pp. 127098

Author(s):

Roman A. Surmenev ◽

Anna A. Ivanova ◽

Matthias Epple ◽

Vladimir F. Pichugin ◽

Maria A. Surmeneva

Keyword(s):

Calcium Phosphate ◽

Radio Frequency ◽

Sputter Deposition ◽

Radio Frequency Magnetron ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter ◽

Physical Principles

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Relationship between plasma parameters and film microstructure in radio frequency magnetron sputter deposition of barium strontium titanate

Journal of Applied Physics ◽

10.1063/1.366802 ◽

1998 ◽

Vol 83 (2) ◽

pp. 1114-1119 ◽

Author(s):

B. Panda ◽

A. Dhar ◽

G. D. Nigam ◽

D. Bhattacharya ◽

S. K. Ray

Keyword(s):

Radio Frequency ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Sputter Deposition ◽

Radio Frequency Magnetron ◽

Plasma Parameters ◽

Barium Strontium ◽

Magnetron Sputter Deposition ◽

Film Microstructure ◽

Magnetron Sputter

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Radio frequency magnetron sputter deposition of CaF2 films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581092 ◽

1998 ◽

Vol 16 (2) ◽

pp. 615-623 ◽

Author(s):

N. J. Dudney

Keyword(s):

Radio Frequency ◽

Sputter Deposition ◽

Radio Frequency Magnetron ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Fabrication of electron injecting Mg:Ag alloy electrodes for organic light‐emitting diodes with radio frequency magnetron sputter deposition

Applied Physics Letters ◽

10.1063/1.117047 ◽

1996 ◽

Vol 69 (11) ◽

pp. 1611-1613 ◽

Author(s):

Hiroyuki Suzuki

Keyword(s):

Radio Frequency ◽

Light Emitting Diodes ◽

Sputter Deposition ◽

Radio Frequency Magnetron ◽

Organic Light Emitting Diodes ◽

Light Emitting ◽

Organic Light ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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DC reactive magnetron sputter deposition of (111) textured TiN films — influence of nitrogen flow and discharge power on the texture formation

Surface and Coatings Technology ◽

10.1016/s0257-8972(00)00569-7 ◽

2000 ◽

Vol 127 (2-3) ◽

pp. 144-154 ◽

Author(s):

S Groudeva-Zotova ◽

R Kaltofen ◽

T Sebald

Keyword(s):

Sputter Deposition ◽

Discharge Power ◽

Texture Formation ◽

Reactive Magnetron ◽

Nitrogen Flow ◽

Tin Films ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Transmission electron microscopy studies of microstructural evolution, defect structure, and phase transitions in polycrystalline and epitaxial Ti1−xAlxN and TiN films grown by reactive magnetron sputter deposition

Thin Solid Films ◽

10.1016/0040-6090(91)90297-b ◽

1991 ◽

Vol 205 (2) ◽

pp. 153-164 ◽

Author(s):

L. Hultman ◽

G. Håkansson ◽

U. Wahlström ◽

J.-E. Sundgren ◽

I. Petrov ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Phase Transitions ◽

Defect Structure ◽

Sputter Deposition ◽

Reactive Magnetron ◽

Tin Films ◽

Transmission Electron ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Microstructural evolution and Poisson ratio of epitaxial ScN grown on TiN(001)/MgO(001) by ultrahigh vacuum reactive magnetron sputter deposition

Journal of Applied Physics ◽

10.1063/1.371555 ◽

1999 ◽

Vol 86 (10) ◽

pp. 5524-5529 ◽

Author(s):

D. Gall ◽

I. Petrov ◽

P. Desjardins ◽

J. E. Greene

Keyword(s):

Microstructural Evolution ◽

Poisson Ratio ◽

Ultrahigh Vacuum ◽

Sputter Deposition ◽

Reactive Magnetron ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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