Molecular beam mass spectrometry studies of nitrogen additions to the gas phase during microwave-plasma-assisted chemical vapour deposition of diamond

1999 ◽  
Vol 8 (2-5) ◽  
pp. 226-230 ◽  
Author(s):  
S.M Leeds ◽  
P.W May ◽  
M.N.R Ashfold ◽  
K.N Rosser
Keyword(s):  
Mass Spectrometry ◽  
Gas Phase ◽  
Chemical Vapour Deposition ◽  
Molecular Beam ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Molecular Beam Mass Spectrometry ◽  
Nitrogen Additions

scholarly journals In situ mass spectrometry analysis of chemical vapour deposition of TiO2 thin films to study gas phase mechanisms

RSC Advances ◽  
2016 ◽  
Vol 6 (113) ◽  
pp. 111797-111805 ◽  
Author(s):  
Ben J. Blackburn ◽  
Charalampos Drosos ◽  
Dean B. Brett ◽  
Michael A. Parkes ◽  
Claire J. Carmalt ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Thin Films ◽  
Gas Phase ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Mass Spectrometry Analysis ◽  
Tio2 Thin Films ◽  
Spectrometry Analysis

In situ mass spectrometry measurements has been used to study as phase intermediates in CVD of TiO2 thin films.

Synthesis of 3-dimensional porous graphene nanosheets using electron cyclotron resonance plasma enhanced chemical vapour deposition

RSC Advances ◽  
2015 ◽  
Vol 5 (103) ◽  
pp. 84927-84935 ◽  
Author(s):  
Rajesh Thomas ◽  
G. Mohan Rao
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Electron Cyclotron Resonance ◽  
Microwave Plasma ◽  
Graphene Nanosheets ◽  
Chemical Vapour ◽  
Hydrogen Gas ◽  
3 Dimensional ◽  
Gas Molecules ◽  
Resonance Plasma

Microwave plasma driven chemical vapour deposition was used to synthesize graphene nanosheets from a mixture of acetylene and hydrogen gas molecules.

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