Effect of substrate temperature on microstructural and optical properties of ZnO films grown by pulsed laser deposition

We investigated the effect of the substrate temperature on the electrical and the optical properties of ZnO/4H-SiC structures. The n-type ZnO layer was grown on p-type 4H-SiC substrate by pulsed laser deposition to form p-n hetero-junction diode structure. The n-type ZnO thin films were deposited by pulsed laser deposition at different temperatures of 200, 400, and 600 °C, respectively. It was shown from transmission line method (TLM) and auger electron spectroscopy (AES) data that the sheet resistance of ZnO on SiC was increases from ~760 Ω/square to ~4000 Ω/square as the deposition temperature increases and the oxygen outdiffusion decreases. The I-V characteristics with and without illumination has also been studied.

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Nanocrystalline ZnO films prepared by pulsed laser deposition and their abnormal optical properties

Applied Surface Science ◽

10.1016/j.apsusc.2013.07.018 ◽

2013 ◽

Vol 283 ◽

pp. 781-787 ◽

Cited By ~ 19

Author(s):

S.S. Xiao ◽

L. Zhao ◽

Y.H. Liu ◽

J.S. Lian

Keyword(s):

Optical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Zno Films

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Study of structural and optical properties of ZnO films grown by pulsed laser deposition

Applied Surface Science ◽

10.1016/j.apsusc.2010.03.026 ◽

2010 ◽

Vol 256 (18) ◽

pp. 5650-5655 ◽

Cited By ~ 50

Author(s):

S. Lemlikchi ◽

S. Abdelli-Messaci ◽

S. Lafane ◽

T. Kerdja ◽

A. Guittoum ◽

...

Keyword(s):

Optical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Zno Films ◽

Structural And Optical Properties

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The effects of substrate temperature on the structure and properties of ZnO films prepared by pulsed laser deposition

Vacuum ◽

10.1016/j.vacuum.2007.07.059 ◽

2008 ◽

Vol 82 (5) ◽

pp. 495-500 ◽

Cited By ~ 69

Author(s):

B.L. Zhu ◽

X.H. Sun ◽

X.Z. Zhao ◽

F.H. Su ◽

G.H. Li ◽

...

Keyword(s):

Substrate Temperature ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Zno Films ◽

Structure And Properties

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Optical properties of antimony-doped p-type ZnO films fabricated by pulsed laser deposition

Journal of Applied Physics ◽

10.1063/1.3126518 ◽

2009 ◽

Vol 105 (11) ◽

pp. 113516 ◽

Cited By ~ 27

Author(s):

X. H. Pan ◽

W. Guo ◽

Z. Z. Ye ◽

B. Liu ◽

Y. Che ◽

...

Keyword(s):

Optical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Zno Films ◽

P Type

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Effects of misfit strain on properties of ZnO films grown by pulsed laser deposition

MRS Proceedings ◽

10.1557/proc-696-n3.25 ◽

2001 ◽

Vol 696 ◽

Author(s):

M.C. Park ◽

W.H. Yoon ◽

D.H. Lee ◽

J.M. Myoung ◽

S.H. Bae ◽

...

Keyword(s):

Optical Properties ◽

Film Thickness ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Xrd Analysis ◽

Misfit Strain ◽

Laser Deposition ◽

Zno Films ◽

X Ray Diffraction ◽

Electrical And Optical Properties

AbstractA series of ZnO films with various thicknesses were prepared on (0001) sapphire substrate by pulsed laser deposition (PLD). Scanning electron microscopy (SEM) and x-ray diffraction (XRD) analysis were utilized to investigate the effects of misfit strain on the surface morphology and the crystallinity. The electrical and optical properties of the films were also investigated as a function of the film thickness. It was found that the crystalline quality, electrical and optical properties of the films depended on the film thickness and were improved with increasing the film thickness. This is attributed to the fact that the films thinner than 400 nm are under the severe misfit strain, which decreases as the film thickness increases further.

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