A Mechanical Beam Resonator Engineered at Nanoscale for Ultralow Thermoelastic Damping

2018 ◽  
Vol 35 (3) ◽  
pp. 351-358
Author(s):  
N. D. Vy ◽  
N. V. Cuong ◽  
C. M. Hoang
Keyword(s):  
Quality Factor ◽  
Thermoelastic Damping ◽  
Attachment Loss ◽  
Beam Resonator ◽  
Torsion Mode ◽  
Resonant Beam ◽  
Intrinsic Quality ◽  
Dimensional Parameters ◽  
Torsion Oscillation

ABSTRACTA mechanical beam resonator engineered at nanoscale for suppressing thermoelastic damping to obtain ultrahigh quality factor is reported. The resonator employs the torsion mode of a spring beam to excite the rotation oscillation of a nanoscale resonant beam. The ultralow thermoelastic damping in the resonator is obtained by employing torsion oscillation. Optimal study of thermoelastic damping is carried out by varying the dimensional parameters of the resonator. The resonator operating in the MHz regime with the quality factor over one million is obtainable by the proposed oscillation exciting method and appropriate design of dimensional parameters of the beams. In order to obtain such overall intrinsic quality factor, virtual supports are employed to eliminate attachment loss in the resonator.

scholarly journals THERMOELASTIC DAMPING DEPENDING ON VIBRATION MODES OF NANO BEAM RESONATOR

2016 ◽  
Vol 25 (4) ◽  
pp. 317 ◽  
Author(s):  
Chu Manh Hoang
Keyword(s):  
Finite Element Method ◽  
Quality Factor ◽  
High Performance ◽  
Vibration Modes ◽  
Internal Damping ◽  
Thermoelastic Damping ◽  
Beam Resonator ◽  
Resonant Modes ◽  
Resonant Beam ◽  
Study Results

The obtainable quality factor for a nano beam resonator is limited due to internal damping such as thermoelastic damping. Therefore, understanding how internal damping varies with the respective resonant modes is very important to design a high performance nanoresonator. In this research, we investigate thermoelastic damping depending on vibration modes of nano beam resonators using finite element method. The study results show that the quality factor of a nanoresonator is lower than at high order modes. The silicon nano beam resonator with the quality factor larger than one million can be achieved by optimizing the dimensions of the resonant beam.

Effect of Axial Prestress on Thermoelastic Damping in Micromechanical Beam Resonators

2011 ◽  
Author(s):  
Wenting Gu ◽  
Peng Cheng ◽  
Julie Hao
Keyword(s):  
Thin Films ◽  
Theoretical Model ◽  
Quality Factor ◽  
Explicit Expression ◽  
Thermal Energy ◽  
Energy Method ◽  
Strain Distribution ◽  
Elastic Strain ◽  
Thermoelastic Damping ◽  
Beam Resonator

Axial prestress is built into those micromechanical beam resonators made of deposited thin films. This prestressaffects elastic strain distribution in a beam resonator and thus has the potential of changing its thermoelastic damping (TED). In this paper, a theoretical model of TED in a micromechanical beam resonator with axial prestressis developed to study the effect of axial prestress on TED in such resonators. This theoretical model is built upon a thermal-energy method and therefore TED is calculated as the generated thermal energy during one cycle of vibration. An explicit expression for the QTED, the Quality factor due to TED, is obtained from this developed model. As a result, this work suggests that, for a beam resonator with axial prestress, its QTEDincreases with tensile prestressand decreases with compressive prestress.

scholarly journals 422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Matthew W. Puckett ◽  
Kaikai Liu ◽  
Nitesh Chauhan ◽  
Qiancheng Zhao ◽  
Naijun Jin ◽  
...  
Keyword(s):  
Quality Factor ◽  
High Capacity ◽  
Precision Spectroscopy ◽  
Narrow Linewidth ◽  
Waveguide Resonator ◽  
Environmental Disturbances ◽  
Fiber Communications ◽  
Intrinsic Quality ◽  
Quality Factor Q ◽  
Quantum Photonics

AbstractHigh quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si3N4 resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453 kHz intrinsic, 906 kHz loaded, and 57 kHz absorption-limited linewidths and the corresponding 0.060 dB m−1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications.

scholarly journals A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes

Micromachines ◽  
2019 ◽  
Vol 10 (10) ◽  
pp. 695
Author(s):  
Lu ◽  
Xi ◽  
Xiao ◽  
Shi ◽  
Zhuo ◽  
...  
Keyword(s):  
Finite Element Method ◽  
Quality Factor ◽  
Second Harmonic ◽  
Great Influence ◽  
Fem Simulation ◽  
Q Factor ◽  
Thermoelastic Damping ◽  
Frequency Trimming ◽  
Quality Factor Q ◽  
Anchor Loss

Frequency trimming based on mass and stiffness modification is an important post-fabrication process for micro-shell resonators (MSRs). However, the trimming effects on the quality factor are seldom studied, although they may have great influence on the performance of the resonator. This paper presents a study on the quality factor (Q-factor) variation of trimmed micro-shell resonators (MSR). Thermoelastic damping (QTED) and anchor loss (Qanchor) are found to be the dominant energy loss mechanisms resulting in the reduction of the overall Q-factor, according to finite element method (FEM). The effects of different trimming methods on QTED and Qanchor are studied here, respectively. It is found that trimming grooves ablated in the rim of the resonator can cause a ~1–10% reduction of QTED, and the length of trimming groove is positively related to the reduction of QTED. The reduction of QTED caused by the mass adding process is mainly related to the thermal expansion coefficient and density of the additive and contact area between the resonator and additive masses. Besides, the first and second harmonic errors caused by asymmetrical trimming can cause a 10–90% reduction of Qanchor. Finally, trimming experiments were conducted on different resonators and the results were compared with FEM simulation. The work presented in this paper could help to optimize the trimming process of MSRs.

scholarly journals Thermoelastic Damping in Vibrating Beam Accelerometer: A New Thermoelastic Finite Element Approach

2006 ◽  
Author(s):  
S. Lepage ◽  
O. Le Traon ◽  
I. Klapka ◽  
S. Masson ◽  
J. C. Golinval
Keyword(s):  
Finite Element ◽  
Quality Factor ◽  
Element Model ◽  
Analytical Models ◽  
Navigation Systems ◽  
Thermoelastic Damping ◽  
Quality Factors ◽  
Inertial Navigation Systems ◽  
Element Approach ◽  
Experimental Values

In order to respond to the demand of accurate miniature inertial navigation systems, ONERA has been working on the design of a vibrating beam accelerometer called the Vibrating Inertial Accelerometer (VIA). The accuracy of the VIA is directly related to the thermoelastic quality factor of its sensitive element, which is a beam made of quartz. In this work, thermo-piezoelectric finite element analyses of the beam are carried out in order to determine its thermoelastic quality factor. These finite element results are compared to the analytical and experimental quality factors. Due to their inherent restrictive assumptions, analytical models overestimate the quality factor while the finite element results are in good agreement with the experimental values. As the finite element model allows to take into account the real geometry of the beam and the piezoelectricity of the material, it allows to quantify more precisely the thermoelastic quality factor.

Study on the reliability evaluation method of the wear life of roller chains

2006 ◽  
Vol 220 (10) ◽  
pp. 1569-1574 ◽  
Author(s):  
S Xu ◽  
Y Wang ◽  
F Meng
Keyword(s):  
Wear Resistance ◽  
Evaluation Method ◽  
Reliability Evaluation ◽  
Evaluation Index ◽  
Sampling Scheme ◽  
Wear Properties ◽  
Wear Life ◽  
Intrinsic Quality ◽  
Dimensional Parameters

Wear resistance property is one of the important characteristics of the intrinsic quality of chains. Formerly, the evaluation index for the quality of roller chains was based on ISO606-94. However, because that version of standardization was mainly related to the exchangeability of dimensional parameters, it was difficult to assess the wear life and reliability of roller chains. The promulgation and implementation of ISO10823-96 makes it now possible to evaluate the life and reliability of roller chains. Based on the sampling theory, this paper discusses in depth the reliability evaluation method of assessing the life of roller chains. A method is proposed to obtain higher quality and reliable roller chains that show good wear properties. A sampling scheme for reliability inspection has also been devised.

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