The Microstructure of Xe Implanted GaAs
Previous investigators have shown that the surface regions of GaAs samples implanted at room temperature with 40-100 keV Ne ions become amorphous after a dose of the order of 1x1014ions cm-2. Their study also indicated that implantation above room temperature (35°-200°C) results in the retention of crystallinity even with fluences two to three orders of magnitude higher. Investigators using ion backscattering and optical absorption have shown that ion dose rate is also an important variable in ion implantation. In the present investigation, transmission microscopy has been used to further study the temperature and dose rate effects of ion implantation in GaAs. A number of {111} and {l00} single crystal GaAs samples have been implanted with 275 keV Xe ions to doses of 1015 and 1016 ions cm-2 at dose rates ranging from 2.5x1012 to 8.1xl012ions cm-2 sec-1.Low dose (1015ions cm-2) implantations at room temperature produced amorphous layers at all dose rates.