Quantitative parallel EELS spectrum imaging developed as a new tool in AEM

Author(s):  
Gianluigi Botton ◽  
Gilles L'espérance

As interest for parallel EELS spectrum imaging grows in laboratories equipped with commercial spectrometers, different approaches were used in recent years by a few research groups in the development of the technique of spectrum imaging as reported in the literature. Either by controlling, with a personal computer both the microsope and the spectrometer or using more powerful workstations interfaced to conventional multichannel analysers with commercially available programs to control the microscope and the spectrometer, spectrum images can now be obtained. Work on the limits of the technique, in terms of the quantitative performance was reported, however, by the present author where a systematic study of artifacts detection limits, statistical errors as a function of desired spatial resolution and range of chemical elements to be studied in a map was carried out The aim of the present paper is to show an application of quantitative parallel EELS spectrum imaging where statistical analysis is performed at each pixel and interpretation is carried out using criteria established from the statistical analysis and variations in composition are analyzed with the help of information retreived from t/γ maps so that artifacts are avoided.

1999 ◽  
Vol 5 (S2) ◽  
pp. 318-319 ◽  
Author(s):  
I.M. Anderson

One of the advantages of performing X-ray microanalysis at low (≤5 kV) operating voltages is that high spatial resolution (≤250 nm) chemical maps of the specimen can be acquired. Spectrum imaging, where a full spectrum is acquired for each pixel in a two-dimensional array, provides the most comprehensive method of characterization, as long as the sampling density (pixel size) is sufficiently smaller than the spatial resolution. Multivariate statistical analysis (MSA) methods are effective in reducing the large (typically ∼10 MByte) raw spectrum images to the modest (typically ∼100 kByte) data files that contain all of the statistically significant information of interest about the specimen. Preliminary analysis of a cross section of a computer chip from a major semiconductor company was previously performed using limited spectrum imaging capabilities available with the 4pi X-ray mapping module, which allowed for simultaneous acquisition of only 48 channels. MSA of images acquired with only a 960 eV portion of the spectrum containing the Al-K, Si-K and W-M lines showed that excellent contrast between the Si- and W-rich regions of the specimen could be achieved in spite of the strong overlap between Si-Kα and W-Mα (∼34 eV separation).


2016 ◽  
Vol 87 (4) ◽  
pp. 469-475 ◽  
Author(s):  
Taisser Zumlot ◽  
Awni Batayneh ◽  
Haider Zaman ◽  
Habes Ghrefat ◽  
Saad Mogren ◽  
...  

1998 ◽  
Vol 08 (02n03) ◽  
pp. 203-208 ◽  
Author(s):  
S. MATSUYAMA ◽  
K. ISHII ◽  
A. SUGIMOTO ◽  
T. SATOH ◽  
K. GOTOH ◽  
...  

We developed a system of μ-PIXE analysis at the division of Takasaki ion accelerator for advanced radiation application (TIARA) in Japan Atomic Energy Research Institute (JAERI), which consists of a microbeam apparatus, a multi-parameter data acquisition system and a personal computer. Elemental analysis in the region of 500 μ m × 500 μ m can be performed with a spatial resolution of < 0.3 μm and multi-elemental distributions are presented as images on a computer display even during measurement. We call this system a micro-PIXE camera.


2003 ◽  
Vol 96 (3-4) ◽  
pp. 481-489 ◽  
Author(s):  
Werner Grogger ◽  
Bernhard Schaffer ◽  
Kannan M. Krishnan ◽  
Ferdinand Hofer

Minerals ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 623
Author(s):  
Vladimir G. Krivovichev ◽  
Sergey V. Krivovichev ◽  
Marina V. Charykova

The chemical diversity and complexity of tellurium minerals were analyzed using the concept of mineral systems and Shannon informational entropy. The study employed data for 176 Te mineral species known today. Tellurium minerals belong to six mineral systems in the range of one-to-six species-defining elements. For 176 tellurium minerals, only 36 chemical elements act as essential species-defining constituents. The numbers of minerals of main elements are calculated as follows (the number of mineral species is given in parentheses): O (89), H (48), Cu (48), Pb (43), Bi (31), S (29), Ag (20), Fe (20), Pd (16), Cl (13), and Zn (11). In accordance with their chemistry, all Te minerals are classified into five types of mineral systems: tellurium, oxides, tellurides and intermetalides, tellurites, and tellurates. A statistical analysis showed positive relationships between the chemical, structural, and crystallochemical complexities and the number of essential species-defining elements in a mineral. A positive statistically significant relationship between chemical and structural complexities was established. It is shown that oxygen-free and oxygen-bearing Te minerals differ sharply from each other in terms of chemical and structural complexity, with the first group of minerals being simpler than the second group. The oxygen-free Te minerals (tellurium, tellurides, and intermetallides) are formed under reducing conditions with the participation of hydrothermal solutions. The most structurally complex oxygen-bearing Te minerals originate either from chemical weathering and the oxidation of ore deposits or from volcanic exhalations (Nabokoite).


1997 ◽  
Vol 487 ◽  
Author(s):  
J. M. Woolfenden ◽  
H. B. Barber ◽  
H. H. Barrett ◽  
E. L. Dereniak ◽  
J. D. Eskin ◽  
...  

AbstractWe are developing modular arrays of CdZnTe radiation detectors for high-resolution nuclear medicine imaging. Each detector is delineated into a 64×64 array of pixels; the pixel pitch is 380 jim. Each pixel is connected to a corresponding pad on a multiplexer readout circuit. The imaging system is controlled by a personal computer. We obtained images of standard nuclear medicine phantoms in which the spatial resolution of approximately 1.5 mm was limited by the collimator that was used. Significant improvements in spatial resolution should be possible with different collimator designs. These results are promising for high-resolution nuclear medicine imaging.


2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Yi-Hui Qiu ◽  
Xin Yang ◽  
Zong-Ze Li ◽  
Chiyu Zhang ◽  
Shui-Xuan Chen

Abstract Artificial intelligence (AI) technology has been widely applied in various fields in recent years. Nevertheless, no systematic study has yet been conducted on the effects of AI technology on different fields. In this study, the impacts of the latest AI technology on technological innovation in different fields were analysed and quantized systematically from a patent perspective. Moreover, trends on AI technological innovation in some fields were analysed thoroughly. We conducted this study on a dataset of patents related to AI technology. Based on the patent dataset, we carried out a statistical analysis on technology fields, which we defined and classified based on international patent classification (IPC) number. Distributions of IPC in different fields were also analysed to determine the trends on AI technological innovation. The research conclusions can provide useful information to investors and enterprises, who are interested in the state of the art concerning AI technology.


Sign in / Sign up

Export Citation Format

Share Document