scholarly journals Utilizing Low-Dose Transmission Electron Microscopy for Structure and Defect Identification in Group III - Nitride Electronic Devices

2018 ◽  
Vol 24 (S1) ◽  
pp. 1972-1973 ◽  
Author(s):  
Petra Specht ◽  
Martina Luysberg ◽  
J. Chavez ◽  
T.R. Weatherford ◽  
T.J. Anderson ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Low Dose ◽  
Electronic Devices ◽  
Defect Identification ◽  
Group Iii ◽  
Transmission Electron ◽  
Group Iii Nitride

scholarly journals Getting the Most out of Direct Detection Cameras for Low-Dose Transmission Electron Microscopy

2014 ◽  
Vol 20 (S3) ◽  
pp. 2140-2141
Author(s):  
Anchi Cheng ◽  
James Pulokas ◽  
Sargis Dallakyan ◽  
Amber Herold ◽  
Clinton S. Potter ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Low Dose ◽  
Direct Detection ◽  
Transmission Electron

Application of Laser Deprocessing Techniques in Physical Failure Analysis

2013 ◽  
Author(s):  
H.H. Yap ◽  
P.K. Tan ◽  
J. Lam ◽  
T.H. Ng ◽  
G.R. Low ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Failure Analysis ◽  
Cost Effective ◽  
Large Area ◽  
Top Down ◽  
Tem Analysis ◽  
Defect Identification ◽  
Nanometer Range ◽  
Transmission Electron

Abstract With the scaling of semiconductor devices to nanometer range, ensuring surface uniformity over a large area while performing top down physical delayering has become a greater challenge. In this paper, the application of laser deprocessing technique (LDT) to achieve better surface uniformity as well as for fast deprocessing of sample for defect identification in nanoscale devices are discussed. The proposed laser deprocess technique is a cost-effective and quick way to deprocess sample for defect identification and Transmission Electron Microscopy (TEM) analysis.

scholarly journals Understanding Ziegler-Natta Catalyst Structure via Low-Dose Transmission Electron Microscopy

2018 ◽  
Vol 24 (S1) ◽  
pp. 1968-1969 ◽  
Author(s):  
David F. Yancey ◽  
Christian Kisielowski ◽  
Petra Specht ◽  
Steve Rozeveld ◽  
Joo Kang ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Low Dose ◽  
Catalyst Structure ◽  
Transmission Electron ◽  
Natta Catalyst ◽  
Ziegler Natta Catalyst
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