scholarly journals Correcting STEM distortions in atomically resolved elemental maps

2021 ◽  
Vol 27 (S1) ◽  
pp. 596-598
Author(s):  
Pavel Potapov ◽  
Axel Lubk ◽  
Martin Kamp ◽  
Martin Stuebinger ◽  
Ralph Claessen ◽  
...  
Keyword(s):  
Elemental Maps

Microchemical imaging in biomedical research

1992 ◽  
Vol 50 (2) ◽  
pp. 1118-1119
Author(s):  
P. Ingram
Keyword(s):  
Data Analysis ◽  
Electron Probe ◽  
The Other ◽  
X Ray ◽  
Cell Element ◽  
Physiological Information ◽  
Functional States ◽  
Elemental Maps ◽  
Electron Energy Loss ◽  
Secondary Ion

It is well established that unique physiological information can be obtained by rapidly freezing cells in various functional states and analyzing the cell element content and distribution by electron probe x-ray microanalysis. (The other techniques of microanalysis that are amenable to imaging, such as electron energy loss spectroscopy, secondary ion mass spectroscopy, particle induced x-ray emission etc., are not addressed in this tutorial.) However, the usual processes of data acquisition are labor intensive and lengthy, requiring that x-ray counts be collected from individually selected regions of each cell in question and that data analysis be performed subsequent to data collection. A judicious combination of quantitative elemental maps and static raster probes adds not only an additional overall perception of what is occurring during a particular biological manipulation or event, but substantially increases data productivity. Recent advances in microcomputer instrumentation and software have made readily feasible the acquisition and processing of digital quantitative x-ray maps of one to several cells.

3D Observation of Elemental Distribution of Si-Device using a Dedicated FIB/STEM System

2005 ◽  
Author(s):  
T. Yaguchi ◽  
M. Konno ◽  
T. Kamino ◽  
M. Ogasawara ◽  
K. Kaji ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Elemental Distribution ◽  
Multivariate Statistical ◽  
X Ray ◽  
Sample Rotation ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Elemental Maps

Abstract A technique for preparation of a pillar shaped sample and its multi-directional observation of the sample using a focused ion beam (FIB) / scanning transmission electron microscopy (STEM) system has been developed. The system employs an FIB/STEM compatible sample rotation holder with a specially designed rotation mechanism, which allows the sample to be rotated 360 degrees [1-3]. This technique was used for the three dimensional (3D) elemental mapping of a contact plug of a Si device in 90 nm technology. A specimen containing a contact plug was shaped to a pillar sample with a cross section of 200 nm x 200 nm and a 5 um length. Elemental analysis was performed with a 200 kV HD-2300 STEM equipped with the EDAX genesis Energy dispersive X-ray spectroscopy (EDX) system. Spectrum imaging combined with multivariate statistical analysis (MSA) [4, 5] was used to enhance the weak X-ray signals of the doped area, which contain a low concentration of As-K. The distributions of elements, especially the dopant As, were successfully enhanced by MSA. The elemental maps were .. reconstructed from the maps.

A Tilting Procedure to Enhance Compositional Contrast and Reduce Residual Bragg Contrast in EFTEM Imaging of Planar Interfaces

2000 ◽  
Vol 6 (S2) ◽  
pp. 156-157
Author(s):  
K.T. Moore ◽  
E.A. Stach ◽  
J.M. Howe ◽  
D.C. Elbert ◽  
D.R. Veblen
Keyword(s):  
Electron Scattering ◽  
Planar Interface ◽  
Zone Axis ◽  
Crystalline Material ◽  
Energy Losses ◽  
Inelastic Electron ◽  
Diffraction Contrast ◽  
Background Removal ◽  
Intensity Changes ◽  
Elemental Maps

When acquiring energy-filtered TEM (EFTEM) images of a crystalline material, the detrimental effects of diffraction contrast can often be seen in raw energy-filtered images (EFI) (i.e., pre-edge and post-edge images), jump-ratio images and elemental maps as residual diffraction contrast. Residual diffraction contrast occurs in raw EFI because of plural scattering (i.e., inelastic-elastic and elastic-inelastic electron scattering) and in jump-ratio images and elemental maps because background removal procedures often are unable to completely account for intensity changes due to dynamical effects (elastic scattering) that occur between pre-edge and post-edge images acquired at different energy losses.It is demonstrated in these experiments that, when examining a planar interface, EFTEM images have increased compositional contrast and decreased residual diffraction contrast when the sample is oriented so that the interface is parallel to the electron beam, but not directly on a zone axis.

scholarly journals Laser ablation ICP-MS of size-segregated atmospheric particles collected with a MOUDI cascade impactor: a proof of concept

2017 ◽  
Vol 10 (5) ◽  
pp. 1823-1830 ◽  
Author(s):  
Marin S. Robinson ◽  
Irena Grgić ◽  
Vid S. Šelih ◽  
Martin Šala ◽  
Marsha Bitsui ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Submicron Particles ◽  
Good Precision ◽  
The Novel ◽  
Proof Of Concept ◽  
Image Mapping ◽  
Icp Ms ◽  
Elemental Image ◽  
Elemental Maps ◽  
Good Agreement

Abstract. A widely used instrument for collecting size-segregated particles is the micro-orifice uniform deposit impactor (MOUDI). In this work, a 10-stage MOUDI (cut-point diameter of 10 µm to 56 nm) was used to collect samples in Ljubljana, Slovenia, and Martinska, Croatia. Filters, collected with and without rotation, were cut in half and analyzed for nine elements (As, Cu, Fe, Ni, Mn, Pb, Sb, V, Zn) using laser ablation ICP-MS. Elemental image maps (created with ImageJ) were converted to concentrations using NIST SRM 2783. Statistical analysis of the elemental maps indicated that for submicron particles (stages 6–10), ablating 10 % of the filter (0.5 cm2, 20 min ablation time) was sufficient to give values in good agreement (±10 %) to analysis of larger parts of the filter and with good precision (RSE < 1 %). Excellent sensitivity was also observed (e.g., 20 ± 0.2 pg m−3 V). The novel use of LA-ICP-MS, together with image mapping, provided a fast and sensitive method for elemental analysis of size-segregated MOUDI filters, particularly for submicron particles.

scholarly journals FEI Tecnai G2 F20

2016 ◽  
Vol 2 ◽  
Author(s):  
Martina Luysberg ◽  
Marc Heggen ◽  
Karsten Tillmann
Keyword(s):  
Scanning Transmission Electron Microscopy ◽  
Dark Field ◽  
Conventional Imaging ◽  
Electron Loss ◽  
High Angle ◽  
X Ray ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Set Up ◽  
Elemental Maps

The FEI Titan Tecnai G2 F20 is a versatile transmission electron microscope which is equipped with a Gatan Tridiem 863P post column image filter (GIF) and a high angle energy dispersive X-ray (EDX) detector. This set up allows for a variety of experiments such as conventional imaging and diffraction, recording of bright- and dark-field scanning transmission electron microscopy (STEM) images, or acquiring elemental maps extracted from energy electron loss spectra (EELS) or EDX signals.

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