Atom Probe Tomography Defines Mainstream Microscopy at the Atomic Scale
Keyword(s):
When making a sculpture, it is the eyes that guide the hands and tools and perceive the outcome. In simple words, “in order to make, you must be able to see.” So too, when making a nanoelectronic device, it is the microscope (eyes) that guides the process equipment (hands and tools) and perceives the outcome. As we emerge into the century of nanotechnology, it is imperative that the eyes on the nanoworld provide an adequate ability to “see.” We have microscopies that resolve 0.02 nm on a surface (scanning tunneling microscope (STM)) or single atoms in a specimen (atom probe tomographs (APT) and transmission electron microscopes (TEM)).
Keyword(s):
2013 ◽
Vol 19
(3)
◽
pp. 652-664
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2013 ◽
Vol 19
(S2)
◽
pp. 980-981
◽
2012 ◽
Vol 463-464
◽
pp. 20-24