Molecular Design of Intercalation-Based Sensors. 1. Ammonia Sensing with Quartz Crystal Microbalances Modified by Copper Biphenylbis(phosphonate) Thin Films

1997 ◽  
Vol 69 (4) ◽  
pp. 679-687 ◽  
Author(s):  
Louis C. Brousseau ◽  
Thomas E. Mallouk
Keyword(s):  
Thin Films ◽  
Quartz Crystal ◽  
Molecular Design ◽  
Ammonia Sensing ◽  
Quartz Crystal Microbalances

Quartz Crystal Microbalances Functionalized with Citric Acid-Doped Polyvinyl Acetate Nanofibers for Ammonia Sensing

2020 ◽  
Vol 3 (6) ◽  
pp. 5687-5697 ◽  
Author(s):  
Roto Roto ◽  
Aditya Rianjanu ◽  
Annisa Rahmawati ◽  
Innas Amaliya Fatyadi ◽  
Nursidik Yulianto ◽  
...  
Keyword(s):  
Citric Acid ◽  
Quartz Crystal ◽  
Polyvinyl Acetate ◽  
Ammonia Sensing ◽  
Quartz Crystal Microbalances

Quartz Crystal Microbalance Studies of the Plasma-Assisted Etching of Polyimide and Tungsten Thin Films

1986 ◽  
Vol 68 ◽  
Author(s):  
F. Fracassi ◽  
J. W. Coburn
Keyword(s):  
Thin Films ◽  
Auger Electron ◽  
Quartz Crystal ◽  
Rf Plasma ◽  
Electron Spectrometer ◽  
Polyimide Films ◽  
Glow Discharges ◽  
Quartz Crystal Microbalances ◽  
Positive Ion ◽  
And Tungsten

AbstractThe etching of polyimide thin films and tungsten thin films has been studied as a function of bias voltage using two quartz crystal microbalances (QCM) installed in a low pressure 13.56 MHz rf plasma system.One of the QCM's is biased (rf bias was used for the polyimide films; de bias was used for the tungsten films) and the other QCM is unbiased.In this way, the influence of energetic positive ion bombardment on etching can be studied.The etching of polyimide is studied in CF4-O2 glow discharges whereas CF4-H2 gas mixtures were used in the etching of tungsten.In the tungsten etching studies, the surfaces were vacuum-transferred to an Auger electron spectrometer for surface analysis.

Porphyrin thin films coated quartz crystal microbalances prepared by electropolymerization technique

1999 ◽  
Vol 354 (1-2) ◽  
pp. 245-250 ◽  
Author(s):  
Roberto Paolesse ◽  
Corrado Di Natale ◽  
Viviana Campo Dall’Orto ◽  
Antonella Macagnano ◽  
Alessio Angelaccio ◽  
...  
Keyword(s):  
Thin Films ◽  
Quartz Crystal ◽  
Quartz Crystal Microbalances

In-situ Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances

2012 ◽  
Vol 1426 ◽  
pp. 307-311 ◽  
Author(s):  
Yeonwon Kim ◽  
Kosuke Hatozaki ◽  
Yuji Hashimoto ◽  
Hyunwoong Seo ◽  
Giichiro Uchida ◽  
...  
Keyword(s):  
Thin Films ◽  
Quartz Crystal ◽  
Volume Fraction ◽  
In Situ Measurements ◽  
Film Deposition ◽  
Silicon Clusters ◽  
Deposition Rates ◽  
Silicon Thin Films ◽  
Quartz Crystal Microbalances

ABSTRACTWe have carried out in-situ measurements of cluster volume fraction in silicon films during deposition by using quartz crystal microbalances (QCM’s) together with a cluster-eliminating filter. The cluster volume fraction in films is deduced from in-situ measurements of film deposition rates with and without silicon clusters using QCM’s. The results show that the higher deposition rate leads to the higher volume fraction of clusters.

INVESTIGATIONS OF HUMIDITY PROPERTIES OF ON INDIUM OXIDE THIN FILMS COATED QUARTZ CRYSTAL MICROBALANCES

2012 ◽  
Vol 40 (2-3) ◽  
pp. 216-225 ◽  
Author(s):  
Leping Chen ◽  
Jian Zhang ◽  
X. H. Zhai ◽  
J. Q. Han ◽  
J. Y. Lu
Keyword(s):  
Thin Films ◽  
Indium Oxide ◽  
Quartz Crystal ◽  
Oxide Thin Films ◽  
Quartz Crystal Microbalances

Assessing simultaneous effect of Ar/O2 ratio and process pressure on ammonia sensing properties of reactive DC magnetron sputtered SnO2 thin films

2021 ◽  
Vol 286 ◽  
pp. 129239
Author(s):  
Rahul Prajesh ◽  
Ravindra Kumar Jha ◽  
Vikas Saini ◽  
Mohd Nahid ◽  
Vinay Goyal ◽  
...  
Keyword(s):  
Thin Films ◽  
Sensing Properties ◽  
Simultaneous Effect ◽  
Ammonia Sensing ◽  
Process Pressure ◽  
Sno2 Thin Films
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