Heteroepitaxial Growth of a Ta3N5 Thin Film with Clear Anisotropic Optical Properties
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2021 ◽
Vol 1105
(1)
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pp. 012065
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2021 ◽
Vol 528
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pp. 167803
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2015 ◽
Vol 45
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pp. 255-261
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2013 ◽
Vol 176
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pp. 736-745
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