Brookite TiO2 Thin Film Epitaxially Grown on (110) YSZ Substrate by Atomic Layer Deposition

This study investigates the chemical reaction mechanism of the ALD to obtain a designated growth behaviour in theoretical and experimental way, hence, provides significant implications for understanding the ALD mechanism based on the DFT calculation.

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Gamma Induced Structural and Optical Changes of TiO2 Thin Film Deposited by Atomic Layer Deposition

Journal of Nanoelectronics and Optoelectronics ◽

10.1166/jno.2018.2422 ◽

2018 ◽

Vol 13 (11) ◽

pp. 1701-1704 ◽

Cited By ~ 1

Author(s):

Syed Mansoor Ali ◽

M. S. Al Garawi ◽

S. S. Al-Ghamdi ◽

Muhammad Hammad Aziz ◽

Turki S. Alkhuraiji ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Tio2 Thin Film ◽

Atomic Layer ◽

Layer Deposition

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Atomic layer deposition derived amorphous TiO2 thin film decorating graphene nanosheets with superior rate capability

Electrochemistry Communications ◽

10.1016/j.elecom.2015.05.005 ◽

2015 ◽

Vol 57 ◽

pp. 43-47 ◽

Cited By ~ 50

Author(s):

Minsi Li ◽

Xifei Li ◽

Weihan Li ◽

Xiangbo Meng ◽

Yan Yu ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Tio2 Thin Film ◽

Graphene Nanosheets ◽

Rate Capability ◽

Atomic Layer ◽

Layer Deposition ◽

Amorphous Tio2

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Hybrid functional IrO2-TiO2 thin film resistor prepared by atomic layer deposition for thermal inkjet printheads

Transactions of Nonferrous Metals Society of China ◽

10.1016/s1003-6326(11)61067-4 ◽

2011 ◽

Vol 21 ◽

pp. s88-s91 ◽

Cited By ~ 7

Author(s):

Won-Sub KWACK ◽

Hyoung-Seok MOON ◽

Seong-Jun JEONG ◽

Qi-min WANG ◽

Se-Hun Kwon

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Tio2 Thin Film ◽

Atomic Layer ◽

Hybrid Functional ◽

Film Resistor ◽

Thin Film Resistor ◽

Layer Deposition

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Adsorption and desorption of toluene on nanoporous TiO2/SiO2 prepared by atomic layer deposition (ALD): influence of TiO2 thin film thickness and humidity

Adsorption ◽

10.1007/s10450-013-9550-3 ◽

2013 ◽

Vol 19 (6) ◽

pp. 1181-1187 ◽

Cited By ~ 13

Author(s):

Hyun Ook Seo ◽

Dae Han Kim ◽

Kwang-Dae Kim ◽

Eun Ji Park ◽

Chae Won Sim ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Film Thickness ◽

Tio2 Thin Film ◽

Atomic Layer ◽

Thin Film Thickness ◽

Adsorption And Desorption ◽

Layer Deposition

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Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2021.160053 ◽

2021 ◽

pp. 160053

Author(s):

Hyunjae Jang ◽

Changyong Oh ◽

Tae Hyun Kim ◽

Hyeong Wook Kim ◽

Sang Ik Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Layer Deposition

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Enhanced Piezoelectric Output Performance of the SnS2/SnS Heterostructure Thin-Film Piezoelectric Nanogenerator Realized by Atomic Layer Deposition

ACS Nano ◽

10.1021/acsnano.1c02757 ◽

2021 ◽

Author(s):

Viet Anh Cao ◽

Minje Kim ◽

Weiguang Hu ◽

Sol Lee ◽

Sukhyeong Youn ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Output Performance ◽

Layer Deposition

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Atomic Layer Deposition of Chalcogenides for Next-Generation Phase Change Memory

Journal of Materials Chemistry C ◽

10.1039/d1tc00186h ◽

2021 ◽

Author(s):

Yoon Kyeung Lee ◽

Chanyoung Yoo ◽

Woohyun Kim ◽

Jeongwoo Jeon ◽

Cheol Seong Hwang

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Film Growth ◽

Phase Change Memory ◽

Film Surface ◽

Atomic Layer ◽

Thin Film Growth ◽

Growth Technique ◽

Layer Deposition ◽

Change Memory

Atomic layer deposition (ALD) is a thin film growth technique that uses self-limiting, sequential reactions localized at the growing film surface. It guarantees exceptional conformality on high-aspect-ratio structures and controllability...

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