Atomic Layer Deposition of Aluminum Oxide Thin Films from a Heteroleptic, Amidinate-Containing Precursor
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2019 ◽
Vol 37
(4)
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pp. 040901
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2020 ◽
Vol 32
(5)
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pp. 1925-1936
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2017 ◽
Vol 309
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pp. 600-608
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