Interaction of Boron and Phosphorus Impurities in Silicon Nanowires during Low-Temperature Ozone Oxidation
2013 ◽
Vol 117
(39)
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pp. 20300-20307
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2010 ◽
Vol 7
(11-12)
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pp. 2716-2719
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2014 ◽
Vol 314
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pp. 628-632
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2020 ◽
Vol 107
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pp. 104832
2012 ◽
Vol 34
(3)
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pp. 204-212
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Keyword(s):
Keyword(s):
Keyword(s):