Defect States below the Conduction Band Edge of HfO2 Grown on InP by Atomic Layer Deposition

2015 ◽  
Vol 119 (11) ◽  
pp. 6001-6008 ◽  
Author(s):  
Yu-Seon Kang ◽  
Dae-Kyoung Kim ◽  
Hang-Kyu Kang ◽  
Sangwan Cho ◽  
Sungho Choi ◽  
...  
Langmuir ◽  
2017 ◽  
Vol 33 (37) ◽  
pp. 9298-9306 ◽  
Author(s):  
William L. Hoffeditz ◽  
Michael J. Pellin ◽  
Omar K. Farha ◽  
Joseph T. Hupp

2005 ◽  
Vol 483-485 ◽  
pp. 559-562 ◽  
Author(s):  
Kun Yuan Gao ◽  
Thomas Seyller ◽  
Konstantin V. Emtsev ◽  
Lothar Ley ◽  
Florin Ciobanu ◽  
...  

Atomic Layer Deposited Al2O3 films on hydrogen-terminated 6H-SiC(0001) were annealed in hydrogen atmosphere and characterized by admittance spectroscopy measurement and photoelectron spectroscopy (PES). The resultant density of interface trap (Dit) from admittance spectroscopy measurement is reduced near mid gap, but increases strongly towards the conduction band edge. Systematic PES measurements show that hydrogen annealing introduces Si4+ as a new component besides Si0 and Si+. Using different electron escape depths for photon electrons, depth profiling of Si in its different oxidation states was performed. The result indicates the formation of a top SiO2 layer and a rougher interfacial layer containing more Si+ and Si4+ which could be responsible for the strong increase of Dit just below the conduction band edge.


Nanoscale ◽  
2015 ◽  
Vol 7 (8) ◽  
pp. 3565-3571 ◽  
Author(s):  
Hyungrae Cha ◽  
Jeongkug Lee ◽  
Luke R. Jordan ◽  
Si Hoon Lee ◽  
Sang-Hyun Oh ◽  
...  

2019 ◽  
Vol 19 (1) ◽  
pp. 253-261 ◽  
Author(s):  
Hemanth Jagannathan ◽  
Lisa F. Edge ◽  
Paul Jamison ◽  
Ryosuke Iijima ◽  
Vijay Narayanan ◽  
...  

2013 ◽  
Vol 8 (1) ◽  
pp. 105 ◽  
Author(s):  
Zhi Wei Ai ◽  
Yun Wu ◽  
Hao Wu ◽  
Ti Wang ◽  
Chao Chen ◽  
...  

2011 ◽  
Vol 3 (11) ◽  
pp. 4415-4419 ◽  
Author(s):  
Yuan-Ming Chang ◽  
Jiann Shieh ◽  
Pei-Yuan Chu ◽  
Hsin-Yi Lee ◽  
Chih-Ming Lin ◽  
...  

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