Dual Patterning of a Poly(acrylic acid) Layer by Electron-Beam and Block Copolymer Lithographies
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2011 ◽
Vol 212
(16)
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pp. 1735-1741
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2005 ◽
Vol 236
(1-4)
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pp. 201-207
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2012 ◽
Vol 22
(5)
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pp. 985-997
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