scholarly journals Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications

2021 ◽  
Vol 7 (1) ◽  
Author(s):  
Zhangbin Ji ◽  
Jian Zhou ◽  
Huamao Lin ◽  
Jianhui Wu ◽  
Dinghong Zhang ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Flexible Electronics ◽  
Wave Equations ◽  
Uv Light ◽  
Theoretical Calculations ◽  
Complex Deformation ◽  
Widespread Application ◽  
Glass Substrates ◽  
Saw Devices ◽  
Acoustic Wave Devices

AbstractFlexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direction and bending direction. Currently, there are few studies on this topic, and the bending mechanisms during off-axis bending deformations have remained unexplored for multisensing applications. Herein, we fabricated aluminum nitride (AlN) flexible SAW devices by using high-quality AlN films deposited on flexible glass substrates and systematically investigated their complex deformation behaviors. A theoretical model was first developed using coupling wave equations and the boundary condition method to analyze the characteristics of the device with bending and off-axis deformation under elastic strains. The relationships between the frequency shifts of the SAW device and the bending strain and off-axis angle were obtained, and the results were identical to those from the theoretical calculations. Finally, we performed proof-of-concept demonstrations of its multisensing potential by monitoring human wrist movements at various off-axis angles and detecting UV light intensities on a curved surface, thus paving the way for the application of versatile flexible electronics.

Flexible surface acoustic wave devices and its applications in microfluidics

2014 ◽  
Vol 1659 ◽  
pp. 27-33
Author(s):  
Jian Zhou ◽  
Xingli He ◽  
Wenbo Wang ◽  
Nana Hu ◽  
Hao Jin ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Electronics ◽  
Lamb Waves ◽  
Acoustic Streaming ◽  
Plastic Films ◽  
Saw Devices ◽  
Flexible Surface ◽  
Developed Surface ◽  
Acoustic Wave Devices

Abstract:Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.

scholarly journals State of the Art in Design and Technology of SAW Devices

1980 ◽  
Vol 6 (3-4) ◽  
pp. 199-204
Author(s):  
P. E. Lagasse
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
State Of The Art ◽  
The State ◽  
Design And Technology ◽  
Saw Devices ◽  
Acoustic Wave Devices

In this paper the different classes of surface acoustic wave devices are briefly reviewed and examples of the state of the art are given. The fabrication techniques and the application of SAW components are also discussed.

Characterization of Group III-Nitride Based Surface Acoustic Wave Devices for High Temperature Applications

2011 ◽  
Vol 1299 ◽  
Author(s):  
J. Justice ◽  
L.E. Rodak ◽  
V. Narang ◽  
K. Lee ◽  
L.A. Hornak ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Harmonic Excitation ◽  
Scattering Parameter ◽  
Group Iii ◽  
Saw Devices ◽  
Before And After ◽  
Metal Organic ◽  
Acoustic Wave Devices ◽  
Group Iii Nitride

ABSTRACTIn this study, aluminum nitride (AlN) and gallium nitride (GaN) thin films have been grown via metal organic vapor phase epitaxy (MOVPE) on silicon and sapphire substrates. Samples were annealed at temperatures ranging from 450 to 1000 °C in atmosphere. AlN and GaN thin film quality has been characterized before and after annealing using scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS) and atomic force microscopy (AFM). Surface acoustic wave (SAW) devices with titanium/platinum interdigital transducers (IDTs) designed to operate at the characteristic frequency and fifth harmonic have been realized using traditional optical photolithographic processes. SAW devices on GaN were thermally cycled from 450 to 850 °C. The S21 scattering parameter of SAW devices was measured before and after thermal cycling by a vector network analyzer (VNA). An approach for the suppression of electromagnetic feedthrough (EF) to improve device performance is discussed. Feasibility of 5th harmonic excitation for GHz operation without sub-micron fabrication is also investigated. SAW devices have also been fabricated on the more traditional SAW substrate, lithium niobate (LiNbO3), and device response was compared with those on AlN and GaN at room temperature.

scholarly journals Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments

RSC Advances ◽  
2020 ◽  
Vol 10 (33) ◽  
pp. 19178-19184
Author(s):  
Shuo Xiong ◽  
Xudong Liu ◽  
Jian Zhou ◽  
Yi Liu ◽  
Yiping Shen ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Lab On A Chip ◽  
Harsh Environments ◽  
Stability Studies ◽  
Piezoelectric Thin Films ◽  
Saw Devices ◽  
Acoustic Wave Devices

Surface acoustic wave (SAW) devices based on piezoelectric thin-films such as ZnO and AlN are widely used in sensing, microfluidics and lab-on-a-chip applications.

Surface Acoustic Wave Devices: Materials Stability in Harsh Environments

2012 ◽  
Vol 1519 ◽  
Author(s):  
Denny Richter ◽  
Michal Schulz ◽  
Sergey Sakharov ◽  
Zachary J. Davis ◽  
Holger Fritze
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Harsh Environments ◽  
Platinum Electrodes ◽  
Saw Devices ◽  
Passivation Layers ◽  
Acoustic Wave Devices ◽  
Gallium Content ◽  
The Stability

ABSTRACTThe availability of high-temperature stable surface acoustic wave (SAW) devices would enable realization of wireless sensors for monitoring high-temperature processes. One of the most promising substrate materials for SAW based high-temperature sensors is langasite (LGS, La3Ga5SiO14). It can be excited piezoelectrically up to its melting point at 1470 °C. However, gallium evaporation and degradation of the electrodes limit the application of LGS in SAW sensors for harsh environments to some extent.The objectives of this work include the investigation of the gallium loss in the vicinity of the langasite surface in oxidizing, reducing and vacuum conditions at temperatures up to 900 °C. The gallium content in the vicinity of the LGS surface is not decreased after annealing the samples in air, while a significant gallium loss occurs in vacuum and reducing atmospheres (0.5 % H2/Ar). The latter results in a gallium oxide deficient region of 1.5 μm below the surface after annealing for 12 hours at 900 °C. The gallium loss is virtually completely suppressed after protecting the surface with a thin alumina film.Further, thin-film electrodes based on platinum and platinum/rhodium are tested. While conventional platinum based electrodes are completely destroyed at 900 °C within hours due to agglomeration, alumina protected electrodes can be operated at least for several days at this temperature. After 400 hours at 700 °C, the alumina protected platinum electrodes show insignificant degradation. The influence of alumina passivation layers on the stability of the SAW devices is examined. Different electrode configurations are tested with respect to their long-term frequency stability at 650 °C.

Surface Acoustic Wave Sensors Deposited on AlN Thin Films

2009 ◽  
Vol 1202 ◽  
Author(s):  
J. L. Justice ◽  
O. M. Mukdadi ◽  
D. Korakakis
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Piezoelectric Materials ◽  
Theoretical Calculations ◽  
Si Substrates ◽  
Sensing Applications ◽  
Saw Devices ◽  
Inherent Frequency ◽  
Wave Sensors

AbstractOver the past few decades, there has been considerable research and advancement in surface acoustic wave (SAW) technology. At present, SAW devices have been highly successful as frequency band pass filters for the mobile telecommunications and electronics industries. In addition to their inherent frequency selectivity, SAW devices are also highly sensitive to surface perturbations. This sensitivity, along with a relative ease of manufacture, makes SAW devices ideally suited for many sensing applications including mass, pressure, temperature, and biosensors. In the area of biosensing, surface plasmon resonance (SPR) and quartz crystal microbalances (QCM) are still in the forefront of research and development, but advancement in SAW sensors could prove to have significant advantages over these technologies. This study investigates the advantages of using aluminum nitride (AlN) as a material for SAW sensors. AlN retains its piezoelectric properties at relatively high temperatures when compared to more common piezoelectric materials such as lead zirconium titanate (PZT), lithium tantalate (LiTaO3) and zinc oxide (ZnO). AlN is also a very robust material making it suitable for biosensing applications where the sensing target is selectively absorbed by an active layer on the device which may attack the piezoelectric layer. AlN thin films of different thicknesses have been deposited on Si substrates by DC reactive sputtering. Rayleigh-wave SAW devices have been fabricated by the deposition of platinum contacts and interdigital transducers (IDTs) onto AlN thin films using standard photolithographic processes. Experiments have been conducted to measure Rayleigh velocities, resonant frequencies, and insertion loss. Experimental results are compared to theoretical calculations.

COUPLING-OF-MODES ANALYSIS OF SAW DEVICES

2000 ◽  
Vol 10 (04) ◽  
pp. 867-947 ◽  
Author(s):  
VICTOR PLESSKY ◽  
JULIUS KOSKELA
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Transverse Wave ◽  
Saw Devices ◽  
Acoustic Wave Devices ◽  
Theoretical Simulations ◽  
Resonator Filters

The coupling-of-modes approach for modeling and analyzing surface-acoustic wave devices is reviewed. We discuss the established formalism and survey the modifications introduced to account for phenomena such as resistivity, dispersion and in particular, the effects related to surface transverse wave and leaky surface-acoustic wave devices. The extraction of the COM parameters from experiments and theoretical simulations are considered. The design of various SAW devices such as resonators and resonator filters as well as practical aspects are discussed. Finally, the unresolved modeling problems are addressed.

First-Order Acoustic Wave Equations and Scattering by Atmospheric Turbules.

1997 ◽  
Author(s):  
George H. Goedecke ◽  
Michael DeAntonio ◽  
Harry J. Auvermann
Keyword(s):  
Acoustic Wave ◽  
Wave Equations ◽  
First Order
Sign in / Sign up

Export Citation Format

Share Document