Surface-plasmon-coupled optical force sensors based on metal–insulator–metal metamaterials with movable air gap
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Air Gap
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Abstract We proposed surface-plasmon-coupled optical force sensors based on metal–insulator–metal (MIM) metamaterials with a movable air gap as an insulator layer. The MIM metamaterial was composed of an air gap sandwiched by a metal nanodot array and a metal diaphragm, the resonant wavelength of which was red-shifted when the air gap was narrowed by applying a normal force. We designed and fabricated a prototype of the proposed sensor and confirmed that the MIM metamaterial could be used as a force sensor with larger sensitivity than a force sensor based on Fabry-Pérot interferometer (FPI).
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2019 ◽
Vol 11
(44)
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pp. 41668-41675
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2014 ◽
Vol 12
(5)
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pp. 460-465
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