scholarly journals Parameter study of the high temperature MOCVD numerical model for AlN growth using orthogonal test design

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Jiadai An ◽  
Xianying Dai ◽  
Lansheng Feng ◽  
Jieming Zheng
Keyword(s):  
High Temperature ◽  
Numerical Model ◽  
Process Parameters ◽  
Cfd Simulation ◽  
Orthogonal Test ◽  
Test Design ◽  
Operating Pressure ◽  
Mocvd Reactor ◽  
Aln Film ◽  
Orthogonal Test Design

AbstractWe investigated the process parameters of the high temperature MOCVD (HT-MOCVD) numerical model for the AlN growth based on CFD simulation using orthogonal test design. It is believed that high temperature growth condition is favorable for improving efficiency and crystallization quality for AlN film, while the flow field in the HT-MOCVD reactor is closely related to the process parameters, which will affect the uniformity of the film. An independently developed conceptual HT-MOCVD reactor was established for the AlN growth to carry out the CFD simulation. To evaluate the role of the parameters systematically and efficiently on the growth uniformity, the process parameters based on CFD simulation were analyzed using orthogonal test design. The advantages of the range, matrix and variance methods were considered and the results were analyzed comprehensively and the optimal process parameters were obtained as follows, susceptor rotational speed 400 rpm, operating pressure 40 Torr, gas flow rate 50 slm, substrate temperature 1550 K.

scholarly journals Parameter Study of the High Temperature MOCVD Numerical Model for AlN Growth Using Orthogonal Test Design

2021 ◽  
Author(s):  
jiadai an ◽  
xianying dai ◽  
lansheng feng ◽  
jieming zheng
Keyword(s):  
High Temperature ◽  
Numerical Model ◽  
Process Parameters ◽  
Cfd Simulation ◽  
Orthogonal Test ◽  
Test Design ◽  
Operating Pressure ◽  
Mocvd Reactor ◽  
Aln Film ◽  
Orthogonal Test Design

Abstract We investigated the process parameters of the high temperature MOCVD (HT-MOCVD) numerical model for the AlN growth based on CFD simulation using orthogonal test design. It is believed that high temperature growth condition is favorable for improving efficiency and crystallization quality for AlN film, while the flow field in the HT-MOCVD reactor is closely related to the process parameters, which will affect the uniformity of the film. An independently developed conceptual HT-MOCVD reactor was established for the AlN growth to carry out the CFD simulation. To evaluate the role of the parameters systematically and efficiently on the growth uniformity, the process parameters based on CFD simulation were analyzed using orthogonal test design. The advantages of the range, matrix and variance methods were considered and the results were analyzed comprehensively and the optimal process parameters were obtained as follows, susceptor rotational speed 400 rpm, operating pressure 40 Torr, gas flow rate 50 slm, substrate temperature 1550 K.

scholarly journals Orthogonal test design for optimizing the extraction of total flavonoids from Flos pueraria

2014 ◽  
Vol 8 (1) ◽  
pp. 1-8 ◽  
Author(s):  
Cai Fei ◽  
Xiao Chen ◽  
Chen Qingjie ◽  
Ouyang Changhan ◽  
Zhang Ruixue ◽  
...  
Keyword(s):  
Orthogonal Test ◽  
Test Design ◽  
Total Flavonoids ◽  
Orthogonal Test Design

Numerical Simulation of Natural Ventilation in Large-Scale Industrial Workshops Based on Orthogonal Test Design

2013 ◽  
Author(s):  
Yan Long ◽  
Jinming Feng ◽  
Ke Liu ◽  
Shiping Jin ◽  
Yan Fu
Keyword(s):  
Heat Source ◽  
Large Scale ◽  
Natural Ventilation ◽  
Orthogonal Test ◽  
Outdoor Environment ◽  
Industrial Plant ◽  
Test Design ◽  
Range Analysis ◽  
Orthogonal Test Design ◽  
Cfd Method

In this paper, orthogonal test design method and the CFD method were used to study the different building envelopes, and the outdoor environment of natural ventilation effect of single span of high temperature industrial workshop. Firstly, 18 ventilation models of workshop with heat source were constructed with orthogonal test design. Secondly, 18 ventilation models of workshop with heat source were simulated with CFD method. Finally, the order of the influencing factors on the ventilation of workshop was obtained through multiple index range analysis of the orthogonal experiment results according to the average temperature inside the workshop. Then the optimal combination of the best ventilation effect was selected. The research results can provide effectively theoretical basis for the future industrial plant ventilation design and optimization.

scholarly journals Optimization of hot-water ice-coring drills

2020 ◽  
pp. 1-8
Author(s):  
An Liu ◽  
Rusheng Wang ◽  
Yang Yang ◽  
Liang Wang ◽  
Xiao Li ◽  
...  
Keyword(s):  
Ice Core ◽  
Ice Cores ◽  
Orthogonal Test ◽  
Hot Water ◽  
Maximum Diameter ◽  
Test Design ◽  
Optimal Angle ◽  
Water Ice ◽  
Orthogonal Test Design ◽  
Nozzle Configuration

Abstract Hot-water ice-coring drills are often used to recover ice core samples from desirable depths in conjunction with full-scale hot-water drilling systems. However, the recovered cores exhibit varying qualities. The coring performance of a hot-water ice-coring drill depends significantly on the structure of the coring drill head (nozzle angle, diameter and number). To discover the most significant factor affecting ice-coring performance, nine types of drill heads were designed and tested in this study according to the orthogonal test design. Results indicated that the nozzle angle is the most significant factor that affects the coring quality and the optimal angle is ~15°. The number of nozzles is the second most important factor; a large number assists in obtaining ice cores of high quality. The optimal nozzle configuration to recover good quality cores are the following: the nozzle diameter, number of nozzles and nozzle angle are 1 mm, 60 nozzles and 15°, respectively, with the maximum diameter and 2 mm, 60 nozzles and 15°, respectively, with the maximum length.

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