Synthesis of aluminium and gallium fluoroalkoxide compounds and the low pressure metal-organic chemical vapor deposition of gallium oxide films

1999 ◽  
Vol 9 (4) ◽  
pp. 929-935 ◽  
Author(s):  
Liliana Mîinea ◽  
Seigi Suh ◽  
Simon G. Bott ◽  
Jia-Rui Liu ◽  
Wei-Kan Chu ◽  
...  
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