Deposition of diamond‐like carbon film using electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.105943 ◽

1991 ◽

Vol 59 (20) ◽

pp. 2532-2534 ◽

Author(s):

S. C. Kuo ◽

E. E. Kunhardt ◽

A. R. Srivatsa

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Diamond Like Carbon Film ◽

Resonance Plasma

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Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l802 ◽

1993 ◽

Vol 32 (Part 2, No. 6A) ◽

pp. L802-L805 ◽

Author(s):

Akira Ishii ◽

Yoshiyuki Sakaguchi ◽

Shoichiro Minomo ◽

Michio Taniguchi ◽

Masato Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Diamond Like Carbon Film ◽

Resonance Plasma

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Super‐wide electron cyclotron resonance plasma source excited by traveling microwave as an efficient tool for diamondlike carbon film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579302 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1241-1243

Author(s):

A. Ishii ◽

S. Amadatsu ◽

S. Minomo ◽

M. Taniguchi ◽

M. Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Efficient Tool ◽

Electron Cyclotron Resonance Plasma ◽

Diamondlike Carbon ◽

Resonance Plasma

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Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation

Acta Physica Sinica ◽

10.7498/aps.54.3241 ◽

2005 ◽

Vol 54 (7) ◽

pp. 3241

Author(s):

Gao Peng ◽

Xu Jun ◽

Deng Xin-Lu ◽

Wang De-He ◽

Dong Chuang

Keyword(s):

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Source Ion Implantation ◽

Resonance Plasma

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Graphene sheets embedded carbon film prepared by electron irradiation in electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.4727894 ◽

2012 ◽

Vol 100 (23) ◽

pp. 231909 ◽

Author(s):

Chao Wang ◽

Dongfeng Diao ◽

Xue Fan ◽

Cheng Chen

Keyword(s):

Electron Irradiation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Electron Cyclotron ◽

Graphene Sheets ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Deposition of ultra-thin diamond-like carbon protective coating on magnetic disks by electron cyclotron resonance plasma technique

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(99)00390-7 ◽

1999 ◽

Vol 254 (1-3) ◽

pp. 167-173 ◽

Author(s):

M.K. Fung ◽

W.C. Chan ◽

K.H. Lai ◽

I. Bello ◽

C.S. Lee ◽

...

Keyword(s):

Protective Coating ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Magnetic Disks ◽

Plasma Technique ◽

Resonance Plasma

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Amorphous carbon film deposition using a DC-biased screen-grid in an electron cyclotron resonance plasma

Vacuum ◽

10.1016/s0042-207x(98)00192-4 ◽

1998 ◽

Vol 51 (3) ◽

pp. 445-451 ◽

Author(s):

SF Yoon ◽

Ruslie ◽

J Ahn ◽

Q Zhang ◽

YS Wu ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Electron Cyclotron ◽

Film Deposition ◽

Amorphous Carbon Film ◽

Electron Cyclotron Resonance Plasma ◽

Screen Grid ◽

Resonance Plasma

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Hydrogen-free diamond-like carbon films prepared by microwave electron cyclotron resonance plasma-enhanced direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.07.067 ◽

2010 ◽

Vol 519 (1) ◽

pp. 86-90 ◽

Author(s):

Lili Ru ◽

Jianjun Huang ◽

Liang Gao ◽

Bing Qi

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Direct Current Magnetron Sputtering ◽

Resonance Plasma

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Mechanical and tribological properties of diamond-like carbon coatings films deposited from an electron cyclotron resonance plasma

Diamond and Related Materials ◽

10.1016/s0925-9635(98)00352-5 ◽

1999 ◽

Vol 8 (2-5) ◽

pp. 567-571 ◽

Author(s):

B Racine ◽

M Benlahsen ◽

K Zellama ◽

M Zarrabian ◽

J.P Villain ◽

...

Keyword(s):

Tribological Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Carbon Coatings ◽

Mechanical And Tribological Properties ◽

Resonance Plasma

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Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

Applied Physics Letters ◽

10.1063/1.102487 ◽

1990 ◽

Vol 56 (15) ◽

pp. 1424-1426 ◽

Author(s):

S. J. Pearton ◽

U. K. Chakrabarti ◽

A. P. Kinsella ◽

D. Johnson ◽

C. Constantine

Keyword(s):

Plasma Etching ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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