Synthesis of aluminum oxide thin films: Use of aluminum tris‐dipivaloylmethanate as a new low pressure metal organic chemical vapor deposition precursor

Aluminum Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Oxide Thin Films ◽

Metal Organic ◽

Metal-organic chemical vapor deposition of aluminum oxide thin films via pyrolysis of dimethylaluminum isopropoxide

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3294718 ◽

2010 ◽

Vol 28 (2) ◽

pp. 238-243 ◽

Cited By ~ 2

Author(s):

Benjamin W. Schmidt ◽

William J. Sweet ◽

Eric J. Bierschenk ◽

Cameron K. Gren ◽

Timothy P. Hanusa ◽

...

Keyword(s):

Thin Films ◽

Aluminum Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Oxide Thin Films ◽

Metal Organic ◽

Growth of magnesium oxide thin films using single molecular precursors by metal–organic chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(98)01524-7 ◽

1999 ◽

Vol 341 (1-2) ◽

pp. 63-67 ◽

Cited By ~ 42

Author(s):

Jin-Hyo Boo ◽

Soon-Bo Lee ◽

Kyu-Sang Yu ◽

Wonyong Koh ◽

Yunsoo Kim

Keyword(s):

Thin Films ◽

Magnesium Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Oxide Thin Films ◽

Molecular Precursors ◽

Metal Organic ◽

Low-Pressure Metal–Organic Chemical Vapor Deposition of Transparent and p-Type Conducting CuCrO2 Thin Films with High Conductivity

10.1002/cvde.200304147 ◽

2003 ◽

Vol 9 (5) ◽

pp. 238-240 ◽

Cited By ~ 58

Author(s):

S. Mahapatra ◽

S.A. Shivashankar

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

High Conductivity ◽

Organic Chemical ◽

Metal Organic ◽

P Type ◽

Synthesis of pyrite (FeS2) thin films by low pressure metal-organic chemical vapor deposition

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:1999877 ◽

1999 ◽

Vol 09 (PR8) ◽

pp. Pr8-613-Pr8-620 ◽

Cited By ~ 1

Author(s):

B. Meester ◽

L. Reijnen ◽

A. Goossens ◽

J. Schoonman

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Metal Organic ◽

Morphology and optical properties of zinc oxide thin films grown on Si (100) by metal-organic chemical vapor deposition

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-008-9664-7 ◽

2008 ◽

Vol 20 (S1) ◽

pp. 441-445 ◽

Cited By ~ 6

Author(s):

S. M. Lan ◽

W. Y. Uen ◽

C. E. Chan ◽

K. J. Chang ◽

S. C. Hung ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Oxide Thin Films ◽

Metal Organic ◽

Growth of atomically flat homoepitaxial magnesium oxide thin films by metal-organic chemical vapor deposition

Materials Chemistry and Physics ◽

10.1016/s0254-0584(00)00502-2 ◽

2001 ◽

Vol 70 (2) ◽

pp. 191-196 ◽

Cited By ~ 10

Author(s):

W Fan ◽

P.R Markworth ◽

T.J Marks ◽

R.P.H Chang

Keyword(s):

Thin Films ◽

Magnesium Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Oxide Thin Films ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Atomically Flat

Zinc oxide thin films nanostructures metal organic chemical vapor deposition

10.32657/10356/3516 ◽

2007 ◽

Author(s):

Swee Tiam Tan

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Oxide Thin Films ◽

Metal Organic ◽

Structure and Electrical Characteristics of Zinc Oxide Thin Films Grown on Si (111) by Metal-organic Chemical Vapor Deposition

Journal of Material Science and Technology ◽

10.1016/j.jmst.2013.06.011 ◽

2013 ◽

Vol 29 (9) ◽

pp. 830-834 ◽

Cited By ~ 13

Author(s):

Yunfeng Wu ◽

Dongping Liu ◽

Naisen Yu ◽

Yuanda Liu ◽

Hongwei Liang ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Electrical Characteristics ◽

Oxide Thin Films ◽

Metal Organic ◽

Effect of the substrate on the growth of spinel iron oxide thin films by metal-organic chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(96)09102-x ◽

1997 ◽

Vol 295 (1-2) ◽

pp. 16-18 ◽

Cited By ~ 14

Author(s):

Kiyoshi Kuribayashi ◽

Ryousuke Ueyama

Keyword(s):

Thin Films ◽

Iron Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Oxide Thin Films ◽

Metal Organic ◽

Resistive Oxygen Sensors Using Cerium Oxide Thin Films Prepared by Metal Organic Chemical Vapor Deposition and Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.6920 ◽

2004 ◽

Vol 43 (10) ◽

pp. 6920-6924 ◽

Cited By ~ 19

Author(s):

Noriya Izu ◽

Norimitsu Murayama ◽

Woosuck Shin ◽

Ichiro Matsubara ◽

Shuzo Kanzaki

Keyword(s):

Thin Films ◽

Cerium Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Oxygen Sensors ◽

Organic Chemical ◽

Oxide Thin Films ◽

Metal Organic ◽