Structural and electronic properties of electron cyclotron resonance plasma deposited hydrogenated amorphous carbon and carbon nitride films

2002 ◽  
Vol 91 (7) ◽  
pp. 4154-4162 ◽  
Author(s):  
C. Godet ◽  
N. M. J. Conway ◽  
J. E. Bourée ◽  
K. Bouamra ◽  
A. Grosman ◽  
...  
Keyword(s):  
Electronic Properties ◽  
Amorphous Carbon ◽  
Cyclotron Resonance ◽  
Carbon Nitride ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Structural And Electronic Properties ◽  
Hydrogenated Amorphous ◽  
Resonance Plasma
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