Nanometer patterning of epitaxial CoSi2/Si(100) for ultrashort channel Schottky barrier metal–oxide–semiconductor field effect transistors

1999 ◽  
Vol 74 (3) ◽  
pp. 454-456 ◽  
Author(s):  
Q. T. Zhao ◽  
F. Klinkhammer ◽  
M. Dolle ◽  
L. Kappius ◽  
S. Mantl
2008 ◽  
Vol 44 (2) ◽  
pp. 159 ◽  
Author(s):  
C.-J. Choi ◽  
M.-G. Jang ◽  
Y.-Y. Kim ◽  
M.-S. Jun ◽  
T.-Y. Kim ◽  
...  

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