Plasma vacuum ultraviolet emission in an electron cyclotron resonance etcher

Applied Physics Letters ◽

10.1063/1.123909 ◽

1999 ◽

Vol 74 (18) ◽

pp. 2599-2601 ◽

Author(s):

C. Cismaru ◽

J. L. Shohet

Keyword(s):

Cyclotron Resonance ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Ultraviolet Emission

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Study of gasdynamic electron cyclotron resonance plasma vacuum ultraviolet emission to optimize negative hydrogen ion production efficiency

Review of Scientific Instruments ◽

10.1063/1.5128313 ◽

2020 ◽

Vol 91 (1) ◽

pp. 013517 ◽

Author(s):

R. L. Lapin ◽

V. A. Skalyga ◽

I. Izotov ◽

S. V. Razin ◽

R. A. Shaposhnikov ◽

...

Keyword(s):

Cyclotron Resonance ◽

Production Efficiency ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Hydrogen Ion ◽

Ultraviolet Emission ◽

Electron Cyclotron Resonance Plasma ◽

Ion Production ◽

Resonance Plasma

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Vacuum ultraviolet radiation damage in electron cyclotron resonance and reactive ion etch plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577365 ◽

1991 ◽

Vol 9 (3) ◽

pp. 804-809 ◽

Author(s):

D. A. Buchanan ◽

G. Fortuño‐Wiltshire

Keyword(s):

Ultraviolet Radiation ◽

Radiation Damage ◽

Cyclotron Resonance ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Vacuum Ultraviolet Radiation

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X‐ray and vacuum ultraviolet imaging for electron cyclotron resonance processing plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578491 ◽

1993 ◽

Vol 11 (4) ◽

pp. 1186-1192 ◽

Author(s):

K. H. Chew ◽

J. L. Shohet ◽

T. J. Castagna ◽

K. L. Seaward ◽

F. F. Mertz

Keyword(s):

Cyclotron Resonance ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

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Topography of an electron cyclotron resonance plasma in the vacuum-ultraviolet spectral range

Review of Scientific Instruments ◽

10.1063/1.1431699 ◽

2002 ◽

Vol 73 (2) ◽

pp. 614-616 ◽

Author(s):

P. Grübling ◽

J. Hollandt ◽

G. Ulm

Keyword(s):

Spectral Range ◽

Cyclotron Resonance ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Vacuum-ultraviolet spectroscopic measurement on an electron-cyclotron-resonance multicharged-ion source

Plasma Sources Science and Technology ◽

10.1088/0963-0252/5/4/004 ◽

1996 ◽

Vol 5 (4) ◽

pp. 632-639 ◽

Author(s):

Yushi Kato ◽

Yushi Tanaka ◽

Shigeyuki Ishii ◽

Masahiro Nishikawa

Keyword(s):

Cyclotron Resonance ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Spectroscopic Measurement

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Characterization of electron cyclotron resonance plasmas by vacuum ultraviolet spectroscopy

Journal of Applied Physics ◽

10.1063/1.360525 ◽

1995 ◽

Vol 78 (11) ◽

pp. 6421-6426 ◽

Author(s):

G. Mehlman ◽

C. R. Eddy ◽

S. R. Douglass

Keyword(s):

Cyclotron Resonance ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Ultraviolet Spectroscopy ◽

Vacuum Ultraviolet Spectroscopy

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Evaluation of Absolute Flux of Vacuum Ultraviolet Photons in an Electron Cyclotron Resonance Hydrogen Plasma: Comparison with Ion Flux

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.08hc02 ◽

2012 ◽

Vol 51 (8S1) ◽

pp. 08HC02

Author(s):

Kazunori Zaima ◽

Kazuaki Kurihara ◽

Koichi Sasaki

Keyword(s):

Cyclotron Resonance ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Ion Flux ◽

Absolute Flux ◽

Ultraviolet Photons

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Evaluation of Absolute Flux of Vacuum Ultraviolet Photons in an Electron Cyclotron Resonance Hydrogen Plasma: Comparison with Ion Flux

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.08hc02 ◽

2012 ◽

Vol 51 ◽

pp. 08HC02 ◽

Author(s):

Kazunori Zaima ◽

Kazuaki Kurihara ◽

Koichi Sasaki

Keyword(s):

Cyclotron Resonance ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Ion Flux ◽

Absolute Flux ◽

Ultraviolet Photons

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Electron cyclotron resonance light source assembly—A vacuum-ultraviolet radiation source based on an electron cyclotron resonance plasma

Review of Scientific Instruments ◽

10.1063/1.1150427 ◽

2000 ◽

Vol 71 (2) ◽

pp. 1200-1202 ◽

Author(s):

P. Grübling ◽

J. Hollandt ◽

G. Ulm

Keyword(s):

Ultraviolet Radiation ◽

Light Source ◽

Cyclotron Resonance ◽

Radiation Source ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Vacuum Ultraviolet Radiation ◽

Resonance Plasma

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Stability of vacuum-ultraviolet radiometric transfer standards: Electron cyclotron resonance versus hollow cathode source

Review of Scientific Instruments ◽

10.1063/1.1835051 ◽

2005 ◽

Vol 76 (2) ◽

pp. 023101 ◽

Author(s):

Alexander Gottwald ◽

Mathias Richter ◽

Gerhard Ulm ◽

Udo Schühle

Keyword(s):

Hollow Cathode ◽

Cyclotron Resonance ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron

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