Vacuum ultraviolet radiation damage in electron cyclotron resonance and reactive ion etch plasmas

1991 ◽  
Vol 9 (3) ◽  
pp. 804-809 ◽  
Author(s):  
D. A. Buchanan ◽  
G. Fortuño‐Wiltshire
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Damage ◽  
Cyclotron Resonance ◽  
Vacuum Ultraviolet ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Vacuum Ultraviolet Radiation

X‐ray and vacuum ultraviolet imaging for electron cyclotron resonance processing plasmas

1993 ◽  
Vol 11 (4) ◽  
pp. 1186-1192 ◽  
Author(s):  
K. H. Chew ◽  
J. L. Shohet ◽  
T. J. Castagna ◽  
K. L. Seaward ◽  
F. F. Mertz
Keyword(s):  
Cyclotron Resonance ◽  
Vacuum Ultraviolet ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
X Ray

On-Wafer Monitoring of Vacuum-Ultraviolet Radiation Damage in High-Density Plasma Processes

2001 ◽  
Vol 40 (Part 2, No. 12B) ◽  
pp. L1346-L1348 ◽  
Author(s):  
Seiji Samukawa ◽  
Yasushi Ishikawa ◽  
Shinya Kumagai ◽  
Mitsuru Okigawa
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Damage ◽  
Vacuum Ultraviolet ◽  
High Density ◽  
Vacuum Ultraviolet Radiation ◽  
Density Plasma
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