Characteristics and design of metal vacuum arc plasma source power supply for pulsed-mode plasma immersion ion implantation
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1999 ◽
Vol 120-121
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pp. 659-662
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Keyword(s):
2014 ◽
Vol 880
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pp. 155-160
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Keyword(s):
2014 ◽
Vol 310
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pp. 120-125
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Keyword(s):
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2007 ◽
Vol 201
(15)
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pp. 6523-6525
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Keyword(s):
1994 ◽
Vol 12
(2)
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pp. 815
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2002 ◽
Vol 73
(8)
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pp. 2971-2973
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