High-frequency short-pulsed metal plasma-immersion ion implantation or deposition using filtered DC vacuum-arc plasma
2007 ◽
Vol 201
(15)
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pp. 6523-6525
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2014 ◽
Vol 880
◽
pp. 155-160
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1999 ◽
Vol 120-121
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pp. 659-662
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2014 ◽
Vol 310
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pp. 120-125
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1994 ◽
Vol 12
(2)
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pp. 815
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