scholarly journals Probing diffusion barrier integrity on porous silica low-k thin films using positron annihilation lifetime spectroscopy

2001 ◽  
Vol 89 (9) ◽  
pp. 5138-5144 ◽  
Author(s):  
Jia-Ning Sun ◽  
David W. Gidley ◽  
Terry L. Dull ◽  
William E. Frieze ◽  
Albert F. Yee ◽  
...  
Keyword(s):  
Thin Films ◽  
Positron Annihilation ◽  
Diffusion Barrier ◽  
Porous Silica ◽  
Positron Annihilation Lifetime Spectroscopy ◽  
Barrier Integrity ◽  
Positron Annihilation Lifetime ◽  
Low K

Positron Annihilation Lifetime Spectroscopy (Pals) Application in Metal Barrier Layer Integrity for Porous Low-K Materials

2001 ◽  
Vol 686 ◽  
Author(s):  
Simon Lin ◽  
Jia-Ning Sun ◽  
David W. Gidley ◽  
Jeffrey T. Wetzel ◽  
K.A. Monnig ◽  
...  
Keyword(s):  
Pore Size ◽  
Positron Annihilation ◽  
Barrier Layer ◽  
Large Scale ◽  
Positron Annihilation Lifetime Spectroscopy ◽  
Small Scale ◽  
Barrier Integrity ◽  
Positron Annihilation Lifetime ◽  
Low K ◽  
Metal Barrier

AbstractPositron Annihilation Lifetime Spectroscopy (PALS) (1, 2) is a useful tool to pre-screen metal barrier integrity for Si-based porous low-k dielectrics. Pore size of low-k, thickness of metal barrier Ta, positronium (Ps) leakage from PALS, trench sidewall morphology, electrical test from one level metal (1LM) pattern wafer and Cu diffusion analysis were all correlated. Macro-porous low-k (pore size >= 200A) and large scale meso-porous low-k (>50∼200A) encounter both Ps leakage and Cu diffusion into low-k dielectric in the 0.25μmL/0.3μmS structures when using SEMATECH in-house PVD Ta 250A as barrier layer. For small scale meso-porous (>20∼50A) and micro-porous (<=20A) low-k, no Ps leakage and no Cu diffusion into low-k were observed even with PVD Ta 50A, which is proved also owing to sidewall densification to seal all sidewall pores due to plasma etch and ash. For future technology, smaller pore size of porous Si-based low-k (=< 50A) will be preferential for dense low-k like trench sidewall to avoid metal barrier integrity due to coverage problems from sidewall pores.

Ellipsometric Porosimetry of Porous Low-k Films with Quazi-Closed Cavities

2004 ◽  
Vol 812 ◽  
Author(s):  
Mikhail R. Baklanov ◽  
Konstantin P. Mogilnikov ◽  
Jin-Heong Yim
Keyword(s):  
Positron Annihilation ◽  
Energy Barrier ◽  
Positron Annihilation Lifetime Spectroscopy ◽  
Ellipsometric Porosimetry ◽  
Positron Annihilation Lifetime ◽  
Short Lifetime ◽  
Sem And Tem ◽  
Comprehensive Information ◽  
Low K ◽  
Good Agreement

AbstractEvaluation of quasi-closed cavities connected with air through narrow necks is discussed. These cavities behave as closed pores when they are studied by Positron Annihilation Lifetime Spectroscopy (PALS). The reason is a short lifetime of o-positronium (Ps) and energy barrier that exist for Ps diffusion from large pores (d>3 nm) to small ones (d<3 nm). It is shown that more comprehensive information can be obtained using adsorption porosimetry. Standard adsorptives used in adsorption porosimetry have infinite lifetime allowing complete penetration and filling all the cavities during the measurement. Calculation of the neck and cavity sizes is based on the theory of metastable adsorption phases developed by Derjagin, Broekhoff and de Boer (DBdB). Results of evaluation are in good agreement with data obtained by SEM and TEM.

In Situ Monitoring of Adsorption and Desorption of n-Heptane on Porous Silica by Positron Annihilation Lifetime Spectroscopy

2012 ◽  
Vol 733 ◽  
pp. 207-211 ◽  
Author(s):  
Radosław Zaleski ◽  
Waldemar Dolecki ◽  
Jacek Goworek
Keyword(s):  
Positron Annihilation ◽  
Porous Silica ◽  
Positron Annihilation Lifetime Spectroscopy ◽  
Intensity Change ◽  
Adsorption And Desorption ◽  
Positron Annihilation Lifetime ◽  
Adsorption Desorption ◽  
Kinetics Of ◽  
Insight Into

Positron annihilation lifetime spectroscopy study of n-heptane adsorption and desorption on silica gel Si-60 gives insight into a free volume evolution during those processes. Analysis of the lifetime distribution allows to ascribe particular ortho-positronium components to silica walls, mesopores and n-heptane. Hysteresis loop of the intensities of the mesopore and n-heptane related components similar to classic adsorption/desorption isotherms is observed. Transition from an adsorbate multilayer structure to liquid when pores become completely filled, manifests itself as an intensity change. Kinetics of desorption and adsorption studies allows to determine the time of reaching the equilibrium by the Si 60–n-heptane system at various pressures.

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