The Structure and Bonding State for Fullerene-Like Carbon Nitride Films with High Hardness Formed by Electron Cyclotron Resonance Plasma Sputtering
2012 ◽
Vol 51
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pp. 125602
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2012 ◽
Vol 51
(12R)
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pp. 125602
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1999 ◽
Vol 09
(PR8)
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pp. Pr8-1131-Pr8-1137
1995 ◽
Vol 05
(C5)
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pp. C5-671-C5-677
1997 ◽
Vol 105
(1224)
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pp. 687-689
2011 ◽
Vol 50
(4)
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pp. 04DA09
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1997 ◽
Vol 15
(1)
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pp. 60
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2004 ◽
Vol 22
(4)
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pp. 1793-1798
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1991 ◽
Vol 30
(Part 1, No. 12B)
◽
pp. 3796-3801
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