Accurate determination of electronic transport properties of silicon wafers by nonlinear photocarrier radiometry with multiple pump beam sizes

2015 ◽  
Vol 118 (21) ◽  
pp. 215707 ◽  
Author(s):  
Qian Wang ◽  
Bincheng Li
Keyword(s):  
Transport Properties ◽  
Electronic Transport ◽  
Pump Beam ◽  
Accurate Determination ◽  
Silicon Wafers ◽  
Photocarrier Radiometry ◽  
Electronic Transport Properties

Accuracy of photocarrier radiometric measurement of electronic transport properties of ion-implanted silicon wafers

2004 ◽  
Vol 96 (1) ◽  
pp. 186-196 ◽  
Author(s):  
Bincheng Li ◽  
Derrick Shaughnessy ◽  
Andreas Mandelis ◽  
Jerias Batista ◽  
Jose Garcia
Keyword(s):  
Transport Properties ◽  
Electronic Transport ◽  
Silicon Wafers ◽  
Radiometric Measurement ◽  
Electronic Transport Properties ◽  
Ion Implanted
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