Real-time optical spectroscopy study of solid-phase crystallization in hydrogenated amorphous silicon

2006 ◽  
Vol 89 (12) ◽  
pp. 121921 ◽  
Author(s):  
P. Stradins ◽  
D. L. Young ◽  
Y. Yan ◽  
E. Iwaniczko ◽  
Y. Xu ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Real Time ◽  
Optical Spectroscopy ◽  
Solid Phase ◽  
Hydrogenated Amorphous Silicon ◽  
Spectroscopy Study ◽  
Solid Phase Crystallization ◽  
Hydrogenated Amorphous

Real Time Monitoring of the Crystallization of Hydrogenated Amorphous Silicon

2005 ◽  
Vol 862 ◽  
Author(s):  
Paul Stradins ◽  
David Young ◽  
Howard M. Branz ◽  
Matthew Page ◽  
Qi Wang
Keyword(s):  
Amorphous Silicon ◽  
Real Time ◽  
Interference Fringe ◽  
Time Window ◽  
Solid Phase ◽  
Hydrogenated Amorphous Silicon ◽  
Optical Reflectance ◽  
Cutoff Energy ◽  
Hydrogenated Amorphous

AbstractIn-situ real-time optical reflectance spectroscopy is applied to investigate structural changes as hydrogenated amorphous silicon (a-Si:H) loses H and crystallizes at elevated temperature. The interference fringe spectrum (cutoff energy and amplitude) mainly characterize changes in the bulk, while the the crystal Si (c-Si) direct-transition ultra-violet reflectance signatures reveal the presence of any crystalline phase at the surface. Effusion of atomic hydrogen is monitored by a decrease of the interference fringe cutoff energy and is thermally activated with about 1.7 eV. In a-Si:H on glass, optical reflectance spectra are consistent with 2.8 eV activated homogeneous nucleation and growth of a small grain (˜ 100 nm) polycrystalline phase. In contrast, a-Si:H on c-Si crystallizes by solid phase epitaxy with very different spectral kinetics. Our measurements reveal the temperature-time window for thermal crystallization of a-Si:H for photovoltaic device applications, and highlight the versatility of the in-situ spectral reflectance monitoring.

Rapid solid-phase crystallization of high-rate, hot-wire chemical-vapor-deposited hydrogenated amorphous silicon

2006 ◽  
Vol 89 (16) ◽  
pp. 161910 ◽  
Author(s):  
David L. Young ◽  
Paul Stradins ◽  
Yueqin Xu ◽  
Lynn Gedvilas ◽  
Bob Reedy ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Solid Phase ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
High Rate ◽  
Hot Wire ◽  
Solid Phase Crystallization ◽  
Chemical Vapor Deposited ◽  
Hydrogenated Amorphous

Study of the effect of boron doping on the solid phase crystallisation of hydrogenated amorphous silicon films

2014 ◽  
Vol 568 ◽  
pp. 38-43 ◽  
Author(s):  
J.M. Westra ◽  
R.A.C.M.M. van Swaaij ◽  
P. Šutta ◽  
K. Sharma ◽  
M. Creatore ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Solid Phase ◽  
Hydrogenated Amorphous Silicon ◽  
Boron Doping ◽  
Silicon Films ◽  
Hydrogenated Amorphous
Sign in / Sign up

Export Citation Format

Share Document