Mass spectrometry study of decomposition of exo-tetrahydrodicyclopentadiene by low-power, low-pressure rf plasma

2009 ◽  
Vol 105 (3) ◽  
pp. 033305 ◽  
Author(s):  
Charles Q. Jiao ◽  
Biswa N. Ganguly ◽  
Alan Garscadden
Keyword(s):  
Mass Spectrometry ◽  
Low Power ◽  
Low Pressure ◽  
Rf Plasma ◽  
Mass Spectrometry Study

Cracking of selected hydrocarbon gases in a low-power, low-pressure RF plasma

2011 ◽  
Vol 20 (1) ◽  
pp. 015013
Author(s):  
Charles Q Jiao ◽  
Biswa N Ganguly ◽  
Alan Garscadden
Keyword(s):  
Low Power ◽  
Low Pressure ◽  
Rf Plasma ◽  
Hydrocarbon Gases

scholarly journals Influence of polycrystalline material on crater shape optimization and roughness using low-power/low-pressure direct-current glow discharge mass spectrometry

2020 ◽  
Vol 35 (7) ◽  
pp. 1450-1457
Author(s):  
Gagan Paudel ◽  
Sergey Khromov ◽  
Martin Kasik ◽  
Hans Jørgen Roven ◽  
Marisa Di Sabatino
Keyword(s):  
Mass Spectrometry ◽  
Glow Discharge ◽  
Low Power ◽  
Shape Optimization ◽  
Direct Current ◽  
Polycrystalline Material ◽  
Low Pressure ◽  
Glow Discharge Mass Spectrometry ◽  
Crater Bottom ◽  
Crater Shape

It is likely that observation of roughness at crater bottom upon GDMS sputtering is due to differential sputtering of grains.

scholarly journals Demonstration of fast-electron populations in a low-pressure, low-power, magnetized RF plasma source

2018 ◽  
Vol 25 (3) ◽  
pp. 030702 ◽  
Author(s):  
P. Jandovitz ◽  
C. Swanson ◽  
J. Matteucci ◽  
R. Oliver ◽  
J. Pearcy ◽  
...  
Keyword(s):  
Low Power ◽  
Fast Electron ◽  
Plasma Source ◽  
Low Pressure ◽  
Rf Plasma
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