FORENSIC EXAMINATION USING A NONDESTRUCTIVE EVALUATION METHOD FOR SURFACE METROLOGY

2009 ◽  
Author(s):  
David J. Eisenmann ◽  
L. Scott Chumbley ◽  
Donald O. Thompson ◽  
Dale E. Chimenti
2010 ◽  
Vol 33 (3-4) ◽  
pp. 1101-1107
Author(s):  
Haoyu Huang ◽  
Ryo Kayata ◽  
Stephane Perrin ◽  
Noritaka Yusa ◽  
Kenzo Miya

2012 ◽  
Vol 22 (2) ◽  
pp. 238-246 ◽  
Author(s):  
Hong Zuo ◽  
Yu-hong Feng

In this article, the experimental measurement method of M-integral is investigated. Through the detailed analysis to the nondestructive evaluation method of J- and M-integrals suggested by King and Herrmann, it is found that the specimen geometry which they selected and the corresponding clamping mode in their test exists a conflict with the stress distribution assumption on the integral contour. The formulas they proposed cannot represent the selected specimen geometry and the related integral contours. To avoid this conflict, a new experimental measurement method and a simper specimen style is proposed in this study. According to the method, the M-integral is nondestructive evaluated experimentally through the new specimen and the new clamping mode.


Author(s):  
Yuhki Sato ◽  
Hideo Miura

A new nondestructive evaluation method of adhesion condition between a Si chip and small metallic bumps in a flip chip bonding structure is proposed. The local deformation of a surface of a Si chip mounted on a substrate increases drastically between two bumps with decrease of the thickness of the chip thinner than 200 μm. The magnitude of the local deformation exceeds 100 nm easily. Once the lack or delamination of the metallic bumps occurs at the interface, the local deformation at a surface of a Si chip around the bump changes remarkably. The change of the magnitude of the local deformation reaches about 50 nm to 600 nm depending on the thickness of the chip. Such a small change of deformation can be measured using a scanning blue laser microscope. Therefore, the adhesion condition of the area-arrayed bumps can be examined by measuring the local deformation of a surface of an LSI chip mounted on a substrate.


2020 ◽  
Vol 40 (6) ◽  
pp. 389-396
Author(s):  
Yeong-Won Choi ◽  
Yun-Taek Yeom ◽  
Hak-Joon Kim ◽  
Sung-Jin Song ◽  
Sung-Woo Ryu ◽  
...  

2010 ◽  
Vol 23 (3) ◽  
pp. 304-311 ◽  
Author(s):  
Yoon-Hee Han ◽  
Yong-Min Shin ◽  
Soung-Be Park ◽  
Sung-Un Nam ◽  
Hyo-Jin Kim

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