Numerical results for the Ar and CF4 mixture gas in a dual frequency capacitively coupled plasma using a hybrid model

2009 ◽  
Vol 16 (4) ◽  
pp. 043510 ◽  
Author(s):  
Zhen-Hua Bi ◽  
Zhong-Ling Dai ◽  
Xiang Xu ◽  
Zhi-Cheng Li ◽  
You-Nian Wang
Keyword(s):  
Hybrid Model ◽  
Numerical Results ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

2016 ◽  
Vol 18 (2) ◽  
pp. 143-146
Author(s):  
Hongyu Wang ◽  
Wei Jiang ◽  
Peng Sun ◽  
Shuangyun Zhao ◽  
Yang Li
Keyword(s):  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Trench and hole patterning with EUV resists using dual frequency capacitively coupled plasma (CCP)

2015 ◽  
Author(s):  
Yannick Feurprier ◽  
Katie Lutker-Lee ◽  
Vinayak Rastogi ◽  
Hiroie Matsumoto ◽  
Yuki Chiba ◽  
...  
Keyword(s):  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Electron Kinetic Property of a Magnetized Dual-Frequency Capacitively-Coupled Plasma

2009 ◽  
Vol 54 (9(5)) ◽  
pp. 317-322 ◽  
Author(s):  
DaeHo Kim ◽  
Chang-Mo Ryu ◽  
SungHee Lee ◽  
JaeKoo Lee
Keyword(s):  
Kinetic Property ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Control of Dual Frequency Capacitively Coupled Plasma via blocking capacitor and phase angle

2017 ◽  
Vol 80 (1) ◽  
pp. 10802
Author(s):  
Arslane Boudghene Stambouli ◽  
Rafik Benallal ◽  
Nourredine Oudini ◽  
Sidi Mohamed Mesli ◽  
Rabah Tadjine
Keyword(s):  
Phase Angle ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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