InGaAsPn‐channel inversion‐mode metal‐insulator‐semiconductor field‐effect transistor with low interface state density

1981 ◽  
Vol 52 (10) ◽  
pp. 6386-6394 ◽  
Author(s):  
Yukinobu Shinoda ◽  
Takeshi Kobayashi
1981 ◽  
Vol 52 (10) ◽  
pp. 6434-6436 ◽  
Author(s):  
Takeshi Kobayashi ◽  
Masamichi Okamura ◽  
Eiichi Yamaguchi ◽  
Yukinobu Shinoda ◽  
Yukihiro Hirota

2001 ◽  
Vol 16 (12) ◽  
pp. 997-1001 ◽  
Author(s):  
Kun-Wei Lin ◽  
Chin-Chuan Cheng ◽  
Shiou-Ying Cheng ◽  
Kuo-Hui Yu ◽  
Chih-Kai Wang ◽  
...  

2012 ◽  
Vol 717-720 ◽  
pp. 777-780
Author(s):  
Kevin M. Speer ◽  
Philip G. Neudeck ◽  
Mehran Mehregany

The SiC vacuum field-effect transistor (VacFET) was first reported in 2010 as a diagnostic tool for characterizing the fundamental properties of the inverted SiC semiconductor surface without confounding issues associated with thermal oxidation. In this paper, interface state densities are extracted from measurements of threshold voltage instability on a SiC VacFET and a SiC MOSFET. It is shown that removing the oxide can reduce the interface state density by more than 70%.


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