Ne[sup +] ion sputtering effect on amorphous Ga-In-Zn-O thin-film surface investigated by high-resolution XPS
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2016 ◽
Vol 361
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pp. 269-276
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2010 ◽
Vol 6
(2)
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pp. 121-126
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2012 ◽
Vol 45
(18)
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pp. 1689-1693
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