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Effect of ion beam energy on density, roughness & uniformity of Co film deposited using ion beam sputtering system
Mapping Intimacies
◽
10.1063/1.4710191
◽
2012
◽
Author(s):
Rajnish Dhawan
◽
Sanjay Rai
◽
G. S. Lodha
Keyword(s):
Beam Energy
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Sputtering System
Download Full-text
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Ultra-low-reflectance, high-uniformity, multilayer-antireflection coatings on large substrates deposited using an ion-beam sputtering system with a customized planetary rotation stage
10.1117/12.896747
◽
2011
◽
Cited By ~ 1
Author(s):
Svetlana Dligatch
◽
Mark Gross
◽
Anatoli Chtanov
Keyword(s):
Ion Beam
◽
Antireflection Coatings
◽
Ion Beam Sputtering
◽
Planetary Rotation
◽
High Uniformity
◽
Beam Sputtering
◽
Rotation Stage
◽
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Argon ion beam voltage in a dual ion beam sputtering system influence on the aluminum nitride films microstructure
Vacuum
◽
10.1016/j.vacuum.2005.01.082
◽
2005
◽
Vol 78
(2-4)
◽
pp. 539-543
◽
Cited By ~ 3
Author(s):
Sheng Han
◽
Hong-Ying Chen
◽
Han C. Shih
Keyword(s):
Aluminum Nitride
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Voltage
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
◽
Argon Ion
◽
Sputtering System
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Argon ion beam voltages influence the microstructure of aluminum nitride films in a dual ion beam sputtering system
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/j.nimb.2005.08.042
◽
2006
◽
Vol 242
(1-2)
◽
pp. 396-398
◽
Cited By ~ 2
Author(s):
Hong-Ying Chen
◽
Sheng Han
◽
Han C. Shih
Keyword(s):
Aluminum Nitride
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
◽
Argon Ion
◽
Sputtering System
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Development of an ion-beam sputtering system for depositing thin films and multilayers of alloys and compounds
Applied Surface Science
◽
10.1016/s0169-4332(02)01120-0
◽
2003
◽
Vol 205
(1-4)
◽
pp. 309-322
◽
Cited By ~ 19
Author(s):
Mukul Gupta
◽
Ajay Gupta
◽
D.M Phase
◽
S.M Chaudhari
◽
B.A Dasannacharya
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Alloys And Compounds
◽
Sputtering System
Download Full-text
Deposition Characteristics of AlN Thin Film Prepared by the Dual Ion Beam Sputtering System
Journal of Electronic Materials
◽
10.1007/s11664-006-0023-2
◽
2006
◽
Vol 36
(1)
◽
pp. 81-87
◽
Cited By ~ 10
Author(s):
T. L. Hu
◽
S. W. Mao
◽
C. P. Chao
◽
M. F. Wu
◽
H. L. Huang
◽
...
Keyword(s):
Thin Film
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
◽
Sputtering System
Download Full-text
Mechanical properties of BCN films deposited by dual cesium ion beam sputtering system
Surface and Coatings Technology
◽
10.1016/s0257-8972(03)00102-6
◽
2003
◽
Vol 169-170
◽
pp. 340-343
◽
Cited By ~ 14
Author(s):
Eungsun Byon
◽
Jong-Kuk Kim
◽
Sunghun Lee
◽
Jun-Hee Hah
◽
Katsuhisa Sugimoto
Keyword(s):
Mechanical Properties
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Cesium Ion
◽
Beam Sputtering
◽
Sputtering System
Download Full-text
Effect of argon ion beam voltages on the microstructure of aluminum nitride films prepared at room temperature by a dual ion beam sputtering system
Applied Surface Science
◽
10.1016/j.apsusc.2004.01.039
◽
2004
◽
Vol 228
(1-4)
◽
pp. 128-134
◽
Cited By ~ 9
Author(s):
Hong-Ying Chen
◽
Sheng Han
◽
Chih-Hsuan Cheng
◽
Han C. Shih
Keyword(s):
Aluminum Nitride
◽
Room Temperature
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
◽
Argon Ion
◽
Sputtering System
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Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method
Applied Optics
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10.1364/ao.50.00c316
◽
2011
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Vol 50
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◽
pp. C316
◽
Cited By ~ 13
Author(s):
Mark Gross
◽
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◽
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Ion Beam
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Ion Beam Sputtering
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Planetary Rotation
◽
Rotation Method
◽
Coating Uniformity
◽
Beam Sputtering
◽
Sputtering System
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Effects of annealing and periodic ion bombardment on the soft magnetism of FexN films by a double ion beam sputtering system
Journal of Applied Physics
◽
10.1063/1.342343
◽
1988
◽
Vol 64
(10)
◽
pp. 5449-5451
◽
Cited By ~ 10
Author(s):
M. Naoe
◽
M. Nagakubo
◽
T. Yamamoto
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◽
Ion Bombardment
◽
Ion Beam Sputtering
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Beam Sputtering
◽
Soft Magnetism
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Thin film deposition from dual ion beam sputtering system
CSI Transactions on ICT
◽
10.1007/s40012-019-00253-8
◽
2019
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Vol 7
(2)
◽
pp. 99-104
Author(s):
Shaibal Mukherjee
Keyword(s):
Thin Film
◽
Ion Beam
◽
Thin Film Deposition
◽
Film Deposition
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
◽
Sputtering System
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