Ion mass spectrometry investigations of the discharge during reactive high power pulsed and direct current magnetron sputtering of carbon in Ar and Ar/N2
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2014 ◽
Vol 32
(4)
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pp. 041510
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2019 ◽
Vol 803
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pp. 341-347
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2009 ◽
Vol 18
(4)
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pp. 045008
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2009 ◽
Vol 6
(S1)
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pp. S548-S553
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