Structure and tribological behavior of (AlCrNbSiTiV)N film deposited using direct current magnetron sputtering and high power impulse magnetron sputtering

2018 ◽  
Vol 668 ◽  
pp. 63-68 ◽  
Author(s):  
Chun-Hao Chang ◽  
Ching-Been Yang ◽  
Chia-Chi Sung ◽  
Chun-Yao Hsu
Keyword(s):  
Magnetron Sputtering ◽  
Direct Current ◽  
High Power ◽  
Tribological Behavior ◽  
Direct Current Magnetron Sputtering

ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering

2021 ◽  
pp. 127029
Author(s):  
Niklas Bönninghoff ◽  
Wahyu Diyatmika ◽  
Jinn P. Chu ◽  
Stanislav Mráz ◽  
Jochen M. Schneider ◽  
...  
Keyword(s):  
Thin Film ◽  
Metallic Glass ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
High Power ◽  
Direct Current Magnetron Sputtering

scholarly journals Reactive sputtering of δ-ZrH2 thin films by high power impulse magnetron sputtering and direct current magnetron sputtering

2014 ◽  
Vol 32 (4) ◽  
pp. 041510 ◽  
Author(s):  
Hans Högberg ◽  
Lina Tengdelius ◽  
Mattias Samuelsson ◽  
Fredrik Eriksson ◽  
Esteban Broitman ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
High Power ◽  
Reactive Sputtering ◽  
Direct Current Magnetron Sputtering

scholarly journals Technical Note:Corrosion Behavior of Post-Deposition Polished Droplet-Embedded Arc Evaporated and Droplet-Free High Power Impulse Magnetron Sputtering/Direct Current Magnetron Sputtering Coatings

CORROSION ◽  
10.5006/2064 ◽  
2017 ◽  
Vol 73 (6) ◽  
pp. 685-693 ◽  
Author(s):  
Arunprabhu Arunachalam Sugumaran ◽  
Yashodhan Purandare ◽  
Arutiun Papken Ehiasarian ◽  
Papken Ehiasarian Hovsepian
Keyword(s):  
Magnetron Sputtering ◽  
Direct Current ◽  
High Power ◽  
Direct Current Magnetron Sputtering ◽  
Post Deposition

Stoichiometry and tribological behavior of thick Ta(N) coatings produced by direct current magnetron sputtering (DCMS)

2018 ◽  
Vol 427 ◽  
pp. 1071-1079 ◽  
Author(s):  
Xiaotong Guo ◽  
Yunsong Niu ◽  
Minghui Chen ◽  
Wenyao Sun ◽  
Shenglong Zhu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Direct Current ◽  
Tribological Behavior ◽  
Direct Current Magnetron Sputtering

scholarly journals Transition between the discharge regimes of high power impulse magnetron sputtering and conventional direct current magnetron sputtering

2009 ◽  
Vol 18 (4) ◽  
pp. 045008 ◽  
Author(s):  
Daniel Lundin ◽  
Nils Brenning ◽  
Daniel Jädernäs ◽  
Petter Larsson ◽  
Erik Wallin ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Direct Current ◽  
High Power ◽  
Direct Current Magnetron Sputtering
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