Experimental observation of standing wave effect in low-pressure very-high-frequency capacitive discharges

2014 ◽  
Vol 116 (4) ◽  
pp. 043303 ◽  
Author(s):  
Yong-Xin Liu ◽  
Fei Gao ◽  
Jia Liu ◽  
You-Nian Wang
Keyword(s):  
Experimental Observation ◽  
Standing Wave ◽  
High Frequency ◽  
Low Pressure ◽  
Very High Frequency ◽  
Wave Effect ◽  
Capacitive Discharges ◽  
Very High

scholarly journals Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges

2007 ◽  
Vol 90 (20) ◽  
pp. 201503 ◽  
Author(s):  
E. V. Barnat ◽  
P. A. Miller ◽  
G. A. Hebner ◽  
A. M. Paterson ◽  
Theodoros Panagopoulos ◽  
...  
Keyword(s):  
High Frequency ◽  
Radial Dependence ◽  
Very High Frequency ◽  
Capacitive Discharges ◽  
Very High

Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges

2019 ◽  
Vol 26 (10) ◽  
pp. 103508 ◽  
Author(s):  
Sarveshwar Sharma ◽  
Nishant Sirse ◽  
Abhijit Sen ◽  
Miles M. Turner ◽  
Albert R. Ellingboe
Keyword(s):  
Electric Field ◽  
High Frequency ◽  
Very High Frequency ◽  
Discharge Parameters ◽  
Capacitive Discharges ◽  
Very High

Kinetic theory of high-frequency and low-pressure atomic discharges

1997 ◽  
Vol 58 (1) ◽  
pp. 123-143
Author(s):  
N. PEYRAUD-CUENCA ◽  
P. FAUCHER
Keyword(s):  
High Pressure ◽  
Kinetic Theory ◽  
High Frequency ◽  
Low Pressure ◽  
Plasma Phys ◽  
Numerical Results ◽  
Very High Frequency ◽  
Argon Discharge ◽  
Very High ◽  
Good Agreement

This paper gives a complete kinetic theory of atomic discharges whatever their parameters. Very high-frequency discharges and high-pressure continuous discharges were studied in an earlier paper by the same authors [J. Plasma Phys. 54, 309 (1995)]; in the present paper we study low-pressure continuous discharges or high-frequency discharges whose parameters satisfy different conditions and therefore cannot be described by the earlier model. Analytical results are applied to a high-frequency argon discharge and to a low-pressure continuous argon discharge. The results are in good agreement with the numerical results of Ferreira and co-workers.

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