Strain and lattice orientation distribution in SiN/Ge complementary metal–oxide–semiconductor compatible light emitting microstructures by quick x-ray nano-diffraction microscopy

2015 ◽  
Vol 106 (7) ◽  
pp. 071902 ◽  
Author(s):  
G. A. Chahine ◽  
M. H. Zoellner ◽  
M.-I. Richard ◽  
S. Guha ◽  
C. Reich ◽  
...  
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