Model and particle-in-cell simulation of ion energy distribution in collisionless sheath

2015 ◽  
Vol 22 (6) ◽  
pp. 063506 ◽  
Author(s):  
Zhuwen Zhou ◽  
Bo Kong ◽  
Deliang Chen ◽  
Yuee Luo ◽  
Yuansheng Wang
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Particle In Cell ◽  
Cell Simulation

A Derivation of Ion Energy Distribution Function for Dual Frequencies Capacitively Coupled Plasma

2014 ◽  
Vol 513-517 ◽  
pp. 4253-4256
Author(s):  
Zhu Wen Zhou ◽  
De Liang Chen ◽  
Bo Kong ◽  
Yuan Sheng Wang
Keyword(s):  
Energy Distribution ◽  
Integrated Circuit ◽  
Theory Model ◽  
Low Frequencies ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distribution ◽  
Particle In Cell ◽  
Capacitively Coupled Plasma ◽  
Ion Energy Distributions

A model of ion energy distribution of dual frequencies capacitively coupled plasma (CCP) has been investigated, it is important to analyze these phenomenon and mechanism in order to control the microelectronic processes of integrated circuit and develop the base theories of plasma physics. We focused on the function of the ion energy distributions under high and low frequencies (dual frequencies) drive in capacitive discharges, we derived a theory model of the dual frequencies driven IEDs from analyzing theories. The model can analyze and predict the IEDs under different high and low frequencies driven, which results in accurate multi-peaks IEDs and energy width for the given control parameters, particle-in-cell (PIC) simulations are used to verify this model.

The ion energy distribution in front of a negative wall

1992 ◽  
Vol 25 (4) ◽  
pp. 620-633 ◽  
Author(s):  
K -U Reimann ◽  
U Ehlemann ◽  
K Wiesemann
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution

Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive

2014 ◽  
Vol 42 (7) ◽  
pp. 1880-1893 ◽  
Author(s):  
David J. Coumou ◽  
David Hamilton Clark ◽  
Theresa Kummerer ◽  
Michael Hopkins ◽  
Donal Sullivan ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution

Ion energy distribution in triode ion plating

Vacuum ◽  
1984 ◽  
Vol 34 (8-9) ◽  
pp. 765-769 ◽  
Author(s):  
P Saulnier ◽  
A Debhi ◽  
J Machet
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Ion Plating
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