Damage free Ar ion plasma surface treatment on In0.53Ga0.47As-on-silicon metal-oxide-semiconductor device
Keyword(s):
1997 ◽
Vol 144
(3)
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pp. 1020-1024
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2005 ◽
pp. 687-692
Keyword(s):
Keyword(s):
2002 ◽
Vol 41
(Part 2, No. 5B)
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pp. L549-L551
1998 ◽
Vol 37
(Part 1, No. 9A)
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pp. 4751-4757
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