Early stages of TiN thin film growth probed using in-situ soft X-ray absorption spectroscopy

2017 ◽  
Author(s):  
Rachana Gupta ◽  
Mukul Gupta ◽  
D. M. Phase
Keyword(s):  
Thin Film ◽  
Absorption Spectroscopy ◽  
Film Growth ◽  
Thin Film Growth ◽  
X Ray ◽  
Early Stages ◽  
X Ray Absorption

Soft x-ray spectrometer for in situ monitoring of thin-film growth

1994 ◽  
Author(s):  
Per Skytt ◽  
Carl J. Englund ◽  
Nial Wassdahl ◽  
Derrick C. Mancini ◽  
Joseph Nordgren
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
In Situ Monitoring ◽  
X Ray

In-Situ Synchrotron X-Ray Scattering Study of Thin Film Growth by Atomic Layer Deposition

2011 ◽  
Vol 11 (2) ◽  
pp. 1577-1580 ◽  
Author(s):  
Yong Jun Park ◽  
Dong Ryeol Lee ◽  
Hyun Hwi Lee ◽  
Han-Bo-Ram Lee ◽  
Hyungjun Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Film Growth ◽  
Atomic Layer ◽  
Thin Film Growth ◽  
X Ray ◽  
X Ray Scattering ◽  
Layer Deposition ◽  
Scattering Study

In situ X-ray investigations of thin film growth

1998 ◽  
Vol 324 (1-2) ◽  
pp. 63-67 ◽  
Author(s):  
A.M. Baranov ◽  
I.F. Mikhailov
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
X Ray

In-situ monitoring of electro-deposition for iron-nickle thin film by time-resolved X-ray absorption spectroscopy

2018 ◽  
Vol 5 (5) ◽  
pp. 10997-11003 ◽  
Author(s):  
Wanwisa Limphirat ◽  
W. Inprasit ◽  
T. Juagwon ◽  
P. Prachopchok ◽  
M. Duriyarattakarn ◽  
...  
Keyword(s):  
Thin Film ◽  
Absorption Spectroscopy ◽  
In Situ Monitoring ◽  
Time Resolved ◽  
Electro Deposition ◽  
X Ray ◽  
X Ray Absorption

In-situ study of Ni–Ti thin film growth on a TiN intermediate layer by X-ray diffraction

2007 ◽  
Vol 126 (1) ◽  
pp. 332-337 ◽  
Author(s):  
R MARTINS ◽  
N SCHELL ◽  
R SILVA ◽  
L PEREIRA ◽  
K MAHESH ◽  
...  
Keyword(s):  
Thin Film ◽  
Intermediate Layer ◽  
Film Growth ◽  
Thin Film Growth ◽  
X Ray Diffraction ◽  
X Ray ◽  
In Situ Study
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